Plasma Nanoscience: From Nature's Mastery to Deterministic Plasma-Aided Nanofabrication

Ostrikov, Kostya Ken

doi:10.1109/tps.2007.892713

Cited by 39 publications

(26 citation statements)

References 40 publications

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“…In fact silicon and other inorganic material nano-grass growth by plasmas is a very active field as evidenced by several publications (14), (15), (16)(17)(18) including a recent review (19). Plasma has thus been proven to direct the assembly of both inorganic nanostructures (20), (19), and organic nanostructures (1),(2), while it has been claimed that plasma nanofabrication mimics nature in the creation of the cosmos (21). Thus, additive or subtractive plasma directed assembly emerges as a new field, under the broad title plasma nanoscience.…”

Section: Introductionmentioning

confidence: 99%

Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials

Gogolides¹,

Constantoudis²,

Kokkoris³

et al. 2011

J. Phys. D: Appl. Phys.

118

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We describe how plasma-wall interactions in etching plasmas lead to either random roughening / nanotexturing of polymeric and Silicon surfaces, or formation of organized nanostructures on such surfaces. We conduct carefully designed experiments of plasma-wall interactions to understand the causes of both phenomena, and present Monte-Carlo simulation results confirming the experiments. We discuss emerging applications in wetting and optical property control, protein adsorption, microfluidics and lab-on-a-chip fabrication and modification, and cost-effective silicon mold fabrication. We conclude with an outlook on the plasma reactor future designs to take advantage of the observed phenomena for new micro and nanomanufacturing processes.

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Section: Introductionmentioning

confidence: 99%

Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials

Gogolides¹,

Constantoudis²,

Kokkoris³

et al. 2011

J. Phys. D: Appl. Phys.

118

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“…Previously, resonances had been considered to be totally [17][18][19][20][21][22][23][24][25][26][27] and plasma physics [6,10,[12][13][14][28][29][30][31][32][33][34] from 1857 to the present day, discussed in detail in Section 1.3 of the main text.…”

Section: Historical Backgroundmentioning

confidence: 99%

“…Plasma nanoscience [108][109][110][111][112] is a research field which incorporates elements of plasma physics, nanoscience, materials science and engineering, physical chemistry and surface science, that is centered on elucidating how a plasma-based growth environment may be used to bring self organisation of nanostructures up to the as yet elusive, deterministic level [6,7,34,110,113,114]. A deterministic fabrication process is one where it can be predicted with a great degree of certainty what type of nanostructure will be produced, from what type and how material is deposited on a surface.…”

Section: Introduction To Plasma Nanosciencementioning

confidence: 99%

Plasmas meet plasmonics

2012

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Abstract. The term 'plasmon' was first coined in 1956 to describe collective electronic oscillations in solids which were very similar to electronic oscillations/surface waves in a plasma discharge (effectively the same formulae can be used to describe the frequencies of these physical phenomena). Surface waves originating in a plasma were initially considered to be just a tool for basic research, until they were successfully used for the generation of large-area plasmas for nanoscale materials synthesis and processing. To demonstrate the synergies between 'plasmons' and 'plasmas', these large-area plasmas can be used to make plasmonic nanostructures which functionally enhance a range of emerging devices. The incorporation of plasmafabricated metal-based nanostructures into plasmonic devices is the missing link needed to bridge not only surface waves from traditional plasma physics and surface plasmons from optics, but also, more topically, macroscopic gaseous and nanoscale metal plasmas. This article first presents a brief review of surface waves and surface plasmons, then describe how these areas of research may be linked through Plasma Nanoscience showing, by closely looking at the essential physics as well as current and future applications, how everything old, is new, once again.

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“…[1][2][3][4][5][6][7] Ion current density is one of the key parameters which should be precisely controlled when a uniform film or nanostructured pattern need to be produced over the entire substrate surface. [8][9][10][11][12][13][14][15] Up to date, vacuum arc deposition and unbalanced magnetron sputtering are the most attractive techniques to deposit thin metal films and nanostructured patterns onto the substrates.…”

Section: Introductionmentioning

confidence: 99%

Control of ion density distribution by magnetic traps for plasma electrons

Baranov

Romanov

Fang

et al. 2012

Journal of Applied Physics

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The effect of a magnetic field of two magnetic coils on the ion current density distribution in the setup for low-temperature plasma deposition is investigated. The substrate of 400 mm diameter is placed at a distance of 325 mm from the plasma duct exit, with the two magnetic coils mounted symmetrically under the substrate at a distance of 140 mm relative to the substrate centre. A planar probe is used to measure the ion current density distribution along the plasma flux cross-sections at distances of 150, 230, and 325 mm from the plasma duct exit. It is shown that the magnetic field strongly affects the ion current density distribution. Transparent plastic films are used to investigate qualitatively the ion density distribution profiles and the effect of the magnetic field. A theoretical model is developed to describe the interaction of the ion fluxes with the negative space charge regions associated with the magnetic trapping of the plasma electrons. Theoretical results are compared with the experimental measurements, and a reasonable agreement is demonstrated.

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Plasma Nanoscience: From Nature's Mastery to Deterministic Plasma-Aided Nanofabrication

Cited by 39 publications

References 40 publications

Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials

Controlling roughness: from etching to nanotexturing and plasma-directed organization on organic and inorganic materials

Plasmas meet plasmonics

Control of ion density distribution by magnetic traps for plasma electrons

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