Plasma ion-beam 3D printing: A novel method for rapid fabrication of customized MEMS sensors

Watanabe, Keiji; Kinoshita, Masaharu; Mine, T.; Morishita, Masatoshi; Fujisaki, Koji; Matsui, Ryohei; Sagawa, M.; Machida, Shinjiro; Oba, Hiroshi; Sugiyama, Yasuhiko; Sugii, Nobuyuki; Ryuzaki, Daisuke; Kurata, Hiroki; Nishimura, Satoshi

doi:10.1109/memsys.2018.8346588

Cited by 4 publications

(5 citation statements)

References 10 publications

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“…Capacitive MEMS vibration sensors were produced by a high-current plasma focused ion beam (FIB) technique and compared with sensors prepared by the common lithography process. While the resonance frequency differed by only 4%, the fabrication time could be reduced by approximately 80% [72].…”

Section: Physical Sensorsmentioning

confidence: 97%

3D Printed MEMS Technology—Recent Developments and Applications

Błachowicz

Ehrmann

2020

Micromachines

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Microelectromechanical systems (MEMS) are of high interest for recent electronic applications. Their applications range from medicine to measurement technology, from microfluidics to the Internet of Things (IoT). In many cases, MEMS elements serve as sensors or actuators, e.g., in recent mobile phones, but also in future autonomously driving cars. Most MEMS elements are based on silicon, which is not deformed plastically under a load, as opposed to metals. While highly sophisticated solutions were already found for diverse MEMS sensors, actuators, and other elements, MEMS fabrication is less standardized than pure microelectronics, which sometimes blocks new ideas. One of the possibilities to overcome this problem may be the 3D printing approach. While most 3D printing technologies do not offer sufficient resolution for MEMS production, and many of the common 3D printing materials cannot be used for this application, there are still niches in which the 3D printing of MEMS enables producing new structures and thus creating elements for new applications, or the faster and less expensive production of common systems. Here, we give an overview of the most recent developments and applications in 3D printing of MEMS.

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Section: Physical Sensorsmentioning

confidence: 97%

3D Printed MEMS Technology—Recent Developments and Applications

Błachowicz

Ehrmann

2020

Micromachines

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“…An improved variant of this process, with a high impact on the MEMS scale, also called focused ion beam (FIB), includes the gas supply through a nozzle close to the focused ion beam source [149]. The same ion beam is used for etching (subtractive operation) and depositing (additive operation) the material.…”

Section: Other Processes 61 Electron/ion Beam Induced Deposition (E/ibid)mentioning

confidence: 99%

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Pasquale

2021

Micromachines

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Recently, additive manufacturing (AM) processes applied to the micrometer range are subjected to intense development motivated by the influence of the consolidated methods for the macroscale and by the attraction for digital design and freeform fabrication. The integration of AM with the other steps of conventional micro-electro-mechanical systems (MEMS) fabrication processes is still in progress and, furthermore, the development of dedicated design methods for this field is under development. The large variety of AM processes and materials is leading to an abundance of documentation about process attempts, setup details, and case studies. However, the fast and multi-technological development of AM methods for microstructures will require organized analysis of the specific and comparative advantages, constraints, and limitations of the processes. The goal of this paper is to provide an up-to-date overall view on the AM processes at the microscale and also to organize and disambiguate the related performances, capabilities, and resolutions.

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“…The group of Watanabe et al [ 46 ] reported an innovative method for 3D printing based on a plasma ion beam. They used a high-current plasma focused ion beam (FIB) to generate customized microelectromechanical systems (MEMS).…”

Section: Innovative Am Technologiesmentioning

confidence: 99%

Antimicrobial Polymers for Additive Manufacturing

González‐Henríquez

Sarabia-Vallejos

Hernández

2019

IJMS

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Three-dimensional (3D) printing technologies can be widely used for producing detailed geometries based on individual and particular demands. Some applications are related to the production of personalized devices, implants (orthopedic and dental), drug dosage forms (antibacterial, immunosuppressive, anti-inflammatory, etc.), or 3D implants that contain active pharmaceutical treatments, which favor cellular proliferation and tissue regeneration. This review is focused on the generation of 3D printed polymer-based objects that present antibacterial properties. Two main different alternatives of obtaining these 3D printed objects are fully described, which employ different polymer sources. The first one uses natural polymers that, in some cases, already exhibit intrinsic antibacterial capacities. The second alternative involves the use of synthetic polymers, and thus takes advantage of polymers with antimicrobial functional groups, as well as alternative strategies based on the modification of the surface of polymers or the elaboration of composite materials through adding certain antibacterial agents or incorporating different drugs into the polymeric matrix.

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Plasma ion-beam 3D printing: A novel method for rapid fabrication of customized MEMS sensors

Cited by 4 publications

References 10 publications

3D Printed MEMS Technology—Recent Developments and Applications

3D Printed MEMS Technology—Recent Developments and Applications

Additive Manufacturing of Micro-Electro-Mechanical Systems (MEMS)

Antimicrobial Polymers for Additive Manufacturing

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