Abstract. In spite of the intense research activities on Plasma Focus devices, the physics of the initial breakdown and surface discharge phase has not been realized completely. In this paper we have analyzed the surface discharge and initial breakdown phase in Filippov-type Plasma Focus Facility "Dena" (90 kJ, 25 kV) on the base of the current and current derivative measured signals by using Argon, Neon and Krypton as working gases at different discharge voltages and gas pressures, and the effects of working conditions (atomic weight, discharge voltage and gas pressure) on the breakdown and surface discharge phase have expressed. Also, on the base of these results, we have investigated about the relation of this phase with final pinch phase.