Plasma Enhanced‐Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma–Surface Interactions, and Film Properties

Creatore, M.; Perrotta, Alberto

doi:10.1002/9783527690275.ch6

Cited by 4 publications

(3 citation statements)

References 72 publications

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“…When calculating the pore size distribution from the relative porosity accessible to the probe molecules, the amount of pores with diameters in the range 0.27–0.42 nm was found to be 2.61 ± 0.02%, the same measured for SiO 2, n 1.426 . It can be concluded that the densification process due to the higher plasma power density has mainly an effect on the pores with a larger diameter, as reported in the literature …”

Section: Resultssupporting

confidence: 69%

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

Perrotta

García

Creatore

2015

Plasma Processes & Polymers

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In this work the combination of ellipsometric porosimetry (EP) and electrochemical impedance spectroscopy (EIS) is extensively addressed in order to characterize the nanoporosity and further elucidate its influence on the water permeation properties of plasma enhanced-CVD SiO 2 layers. Pores with diameter in the range of 0.27-0.6 nm are studied by adopting a multisolvent/multi-ion approach, with EP and EIS, respectively. This combined study has brought to conclude that open pores larger than 0.42 nm are responsible for WVTR values in the range of 10 À3 -10 À5 gm À2 d À1 , while pores with diameter between 0.42-0.27 nm were found to drive the transition to excellent moisture barrier layers (10Moreover, it is shown that EIS is capable of detecting macro-scale defects, next to nanoporosity, being thus a powerful tool for the analysis of moisture barrier layers.

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Section: Resultssupporting

confidence: 69%

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

Perrotta

García

Creatore

2015

Plasma Processes & Polymers

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“…An excellent overview of the plasma-chemical and physical processes can be found by Michelmore et al [7]. Many excellent reviews and books have been published in recent years beside still valuable elderly review articles to discuss several aspects of plasma surface treatment and coating of polymers [8][9][10][11][12][13]. Different plasma sources and equipment have been developed and improved over years including capacitively and inductively coupled plasmas (CCP and ICP), microwave (MW), arc and magnetron discharges as well as combinations running with continuous or modulated (pulsed) power from low pressure (LP) to atmospheric pressure (AP).…”

Section: Plasma Surface Engineering-general Overviewmentioning

confidence: 99%

“…Accordingly, plasma polymers show highly branched and crosslinked structures different to conventional polymers [30]. Hence, both plasma chemistry (by the selection of the starting molecules and their energy uptake) and plasma physics (by the role of ions during plasmasurface interaction) are key parameters for the engineering of manmade soft materials and deposition of functional films [12,13].…”

Section: Plasma Surface Engineering-general Overviewmentioning

confidence: 99%

Plasma surface engineering for manmade soft materials: a review

Hegemann¹,

Gaiser²

2021

J. Phys. D: Appl. Phys.

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Manmade soft materials are important in a wide range of technological applications and play a key role in the development of future technologies, mainly at the interface of synthetic and biological components. They include gels and hydrogels, elastomers, structural and packaging materials, micro and nanoparticles as well as biological materials. Soft materials can be distinguished from liquids owing to their defined shape and from hard materials by the deformability of their shape. This review article provides an overview of recent progress on the plasma engineering and processing of softer materials, especially in the area of synthesis, surface modification, etching, and deposition. The article aims to demonstrate the extensive range of plasma surface engineering as used to form, modify, and coat soft materials focusing on material properties and potential applications. In general, the plasma provides highly energetic, non-equilibrium conditions at material surfaces requiring to adjust the conditions for plasma-surface interaction to account for the specifics of soft matter, which holds independent of the used plasma source. Plasma-induced crosslinking and polymerization of liquids is discussed to transform them into gel-like materials as well as to modify the surface region of viscous liquids. A major field covers the plasma surface engineering of manmade soft materials with the help of gaseous reactive species yielding ablation, nanostructuring, functionalization, crosslinking, stiffening, and/or deposition to obtain demanded surface properties or adhesion to dissimilar materials. Finally, plasma engineering of rigid materials is considered to induce surface softening for the enhanced contact with tissues, to allow interaction in aqueous media, and to support bonding to soft matter. The potential and future perspectives of plasma engineering will be discussed in this review to contribute to a higher knowledge of plasma interaction with sensitive materials such as soft matter.

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Strategies for Drug Encapsulation and Controlled Delivery Based on Vapor‐Phase Deposited Thin Films

2017

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Vapor-phase deposition methods allow the synthesis and engineering of organic and inorganic thin films, with high control on the chemical composition, physical properties, and conformality. In this review, the recent applications of vapor-phase deposition methods such as initiated chemical vapor deposition (iCVD), plasma enhanced chemical vapor deposition (PE-CVD), and atomic layer deposition (ALD), for the encapsulation of active pharmaceutical drugs are reported. The strategies and emergent routes for the application of vapor-deposited thin films on the drug controlled release and for the engineering of advanced release nanostructured devices are presented.

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Plasma Enhanced‐Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma–Surface Interactions, and Film Properties

Cited by 4 publications

References 72 publications

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

Ellipsometric Porosimetry and Electrochemical Impedance Spectroscopy Characterization for Moisture Permeation Barrier Layers

Plasma surface engineering for manmade soft materials: a review

Strategies for Drug Encapsulation and Controlled Delivery Based on Vapor‐Phase Deposited Thin Films

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