1978
DOI: 10.1116/1.569453
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Plasma diagnostics with electric probes

Abstract: The use of Langmuir or electric probes in collisionless plasmas which are of interest in sputter coating is briefly reviewed. The analysis of the probe current–voltage characteristic, especially that from double floating probes, to yield the plasma parameters, the electron temperature, and the ionization density, is considered in some detail. This paper is intended to be of use to the experimentalist who wishes to use Langmuir probes as a diagnostic tool but does not really want to become an expert in all aspe… Show more

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Cited by 112 publications
(14 citation statements)
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“…Electron number density was determined from the electron temperature and electron saturation current measurements, both of which were obtained from the current-voltage traces by the method in [16], as shown here:…”
Section: A Plasma Parameter Determinationmentioning
confidence: 99%
“…Electron number density was determined from the electron temperature and electron saturation current measurements, both of which were obtained from the current-voltage traces by the method in [16], as shown here:…”
Section: A Plasma Parameter Determinationmentioning
confidence: 99%
“…Laframboise's theory was used to analyze the Langmuir probe data [25], analyzing the electron current to the probe, I e , in the transition region of the current-voltage (I -V) characteristics (assuming Maxwellian electron distribution [27]).…”
Section: Arc-jet Facility Set-up For On-ground Simulation Of Communicmentioning
confidence: 99%
“…This electron confinement significantly increases the efficiency and, as a result, a magnetron can operate at low pressures (e.g., 1-3 mtorr) and low voltage (e.g., 350 V). Figure 2 shows a cross-sectional view of a typical planar magnetron [4,9,[63][64][65]. Therefore, the erosion of the target is nonuniform.…”
Section: β Magnetron Sputter Sourcesmentioning
confidence: 99%