Plasma diagnostic on a low-flow plasma for inductively coupled plasma optical emission spectrometry

Engelhard, Mark H.; Chan, George C.-Y.; Gamez, Gerardo; Büscher, Wolfgang; Hieftje, Gary M.

doi:10.1016/j.sab.2008.03.015

Cited by 29 publications

(23 citation statements)

References 48 publications

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“…It should be noted, that calculated here the ionization temperature and the electron number density were significantly lower than those reported for Fig. 10 The electron number density and ionization temperature for the liquid cathode-solid anode system an atmospheric pressure ICP source [27,34]. It is mainly connected with the power of the applied plasma source and conditions of the plasma generation.…”

Section: The Excitation Vibrational and Rotational Temperatures In Tcontrasting

confidence: 52%

“…The electron number density and ionization degree of Mg changed over the range (3.4 -6.8) 9 10 20 m -3 and 9-21%, respectively. For comparison, in an atmospheric pressure ICP the electron density is one to two orders higher, the Mg ionization degree reaches 95-99% while the excitation and ionization temperatures are usually between 5,000 and 10,000 K [34], so the APGD plasma is much more far from the LTE state than the ICP. However, the results indicate that deviations from local thermal equilibrium are not large and rather depend on plasma generation conditions.…”

Section: Discussionmentioning

confidence: 99%

“…However, at the assumption of the partial LTE state, the ionization temperature may be evaluated for the investigated plasma using the Boltzmann-Saha equation. A similar procedure was recently applied for the determination of the ionization temperature in atmospheric pressure glow discharges generated in air [20] and He [33], and an atmospheric pressure ICP [27,34].…”

Section: The Excitation Vibrational and Rotational Temperatures In Tmentioning

confidence: 99%

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Spectroscopic Characterization of Miniaturized Atmospheric-Pressure dc Glow Discharge Generated in Contact with Flowing Small Size Liquid Cathode

Jamróz

Żyrnicki

2011

Plasma Chem Plasma Process

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The miniaturized atmospheric pressure glow discharge (APGD) generated between a solid electrode and a flowing small size liquid cathode (dimension 2 mm) was investigated here using optical emission spectroscopy. The discharge was studied in an open air atmosphere, and the spectral characteristics of the plasma source was examined. Analysed APGD was operated at a discharge voltage of 1,100-1,700 V, a discharge current of 20 mA and gaps between a solid anode and a liquid cathode in the range from 0.5 to 3.5 mm. The emission intensities of the main species were measured as a function of various experimental conditions, including the solution flow rate, the gap between the electrodes, and the concentration of hydrochloric acid. The excitation temperature, the vibrational temperatures calculated from N 2 , OH, and NO bands, and the rotational temperatures determined from band of OH, N 2 and NO, were found to be dependent on these experimental parameters. The electron number density was determined from the Stark broadening of H b line. Additionally, the ionization temperature and degree were calculated using the Saha-Boltzmann equation, with the ion to atom ratio for magnesium (MgII/MgI). The results demonstrated that T exc (H), T vib (N 2 ), T vib (OH), T vib (NO) and T rot (OH) were well comparable (*3,800-4,200 K) for selected plasma generation conditions (gap C2.5 mm, HCl concentration C0.1 mol L -1 ), while the rotational temperatures determined from band of N 2 (*1,700-2,100 K) and band of NO (*3,000 K) were considerably lower. The electron number density was evaluated to be (3.4-6.8) 9 10 20 m -3 and the ionization temperature varied, throughout in the 4,900-5,200 K range.

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Section: The Excitation Vibrational and Rotational Temperatures In Tcontrasting

confidence: 52%

Section: Discussionmentioning

confidence: 99%

Section: The Excitation Vibrational and Rotational Temperatures In Tmentioning

confidence: 99%

See 1 more Smart Citation

Spectroscopic Characterization of Miniaturized Atmospheric-Pressure dc Glow Discharge Generated in Contact with Flowing Small Size Liquid Cathode

Jamróz

Żyrnicki

2011

Plasma Chem Plasma Process

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“…5a. This particular selection of OH lines was used in many other studies [24][25][26][27]. The measurements were carried out for the same positions as relative OH intensity measurements (Fig.…”

Section: Temperature Profile From Oesmentioning

confidence: 99%

Spatially resolved spectroscopy of an atmospheric pressure microwave plasma jet used for surface treatment

2014

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Abstract:In this study, the variations of properties of a microwave plasma jet (surfatron) along the discharge axis have been investigated using optical emission spectroscopy. As the argon jet is not enclosed, the spatial distribution of individual species in effluent plasma is the result of rather complicated interplay between energy loss and gradual mixing with the air. Spatial 2D relative intensity profiles of atomic lines and molecular bands at 310 nm, 336 nm, 391 nm and 656 nm are presented in the form of colour maps revealing different positions of maximum emission intensity for 310 nm and 336 nm (in the effluent plasma) and for 391 nm and 656 nm (inside the discharge tube). The plasma jet was used for surface treatment of heat resistant samples (stainless steel, aluminium, silicon wafer) and the effectiveness of the plasma treatment was evaluated by measuring the sessile drop contact angle, with water and glycerol as testing liquids. The optimal position for plasma treatment (close to the tube nozzle) combined with longer treatment time (10 s) lead to hydrophilic properties of samples with contact angles as low as 10°.

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“…Though these low gas flow torches could sustain ICPs under low Ar plasma gas flow rate, lower RF forward power was applied compared with the ICP sustained by the Fassel type torch (from 1.3 to 1.5 kW), in order to prevent torch melting. A SHIP (static high sensitivity ICP) torch which was one of the air cooled torches for ICPOES was reported; [17][18][19][20][21] however, the torch could also input lower RF forward power of up to 1.2 kW.…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic Characteristics of Spiral Flow ICP for Axially Viewing ICP Optical Emission Spectrometry

Ohata

Kurosawa²,

Shinoduka³

et al. 2015

ANAL. SCI.

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Spectroscopic characteristics of a spiral flow inductively coupled plasma (ICP), which could be sustained stably at 9 L min -1 of Ar plasma gas flow rate with 1.5 kW RF forward power, were studied for axially viewing ICPOES. The emission intensity profile, excitation temperature and plasma robustness were evaluated, and were similar to those of the standard ICP. The background and emission intensities of elements as well as the excitation behavior for both atom and ion lines were also examined and compared to those of the standard ICP. Since the spectroscopic characteristics of the spiral flow ICP were similar to those of the standard ICP, it could be used as a new low gas flow ICP in axially viewing ICPOES.

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Plasma diagnostic on a low-flow plasma for inductively coupled plasma optical emission spectrometry

Cited by 29 publications

References 48 publications

Spectroscopic Characterization of Miniaturized Atmospheric-Pressure dc Glow Discharge Generated in Contact with Flowing Small Size Liquid Cathode

Spectroscopic Characterization of Miniaturized Atmospheric-Pressure dc Glow Discharge Generated in Contact with Flowing Small Size Liquid Cathode

Spatially resolved spectroscopy of an atmospheric pressure microwave plasma jet used for surface treatment

Spectroscopic Characteristics of Spiral Flow ICP for Axially Viewing ICP Optical Emission Spectrometry

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