2018
DOI: 10.1088/1742-6596/1027/1/012005
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Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma –A Brief Introduction

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Cited by 3 publications
(1 citation statement)
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“…The atoms on the target material's outer surface are sputtered outward when they receive enough energy to break their bonds with nearby atoms. Through a super-clean environment created by the vacuum pump, the sputtered atoms travel toward the surface of the substrate that is placed on the substrate holder [109,112,113].…”
Section: Magnetron Sputteringmentioning
confidence: 99%
“…The atoms on the target material's outer surface are sputtered outward when they receive enough energy to break their bonds with nearby atoms. Through a super-clean environment created by the vacuum pump, the sputtered atoms travel toward the surface of the substrate that is placed on the substrate holder [109,112,113].…”
Section: Magnetron Sputteringmentioning
confidence: 99%