Development of titanium nitride thin film microheaters using laser micromachining

Jithin, M.; Ganapathi, K.; Ambresh, M; Nukala, Pavan; Udayashankar, N.K.; Mohan, S.

doi:10.1016/j.vacuum.2021.110795

Cited by 14 publications

(11 citation statements)

References 22 publications

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“…Sui, et al [67], used photolithography to define the chromium (Cr) hard mask after the completion of chromium deposition with the goal of fabricating GaN/AIN. A different photolithography technique known as two-photon lithography has been used for manufacturing complex 3D structures on the micro-and nanoscale [68]. Three-dimensional direct laser lithography based on multiphoton absorption has also been used for nanoscale structure fabrication [69].…”

Section: Photolithographymentioning

confidence: 99%

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

et al. 2022

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bioNEMS/MEMS has emerged as an innovative technology for the miniaturisation of biomedical devices with high precision and rapid processing since its first R&D breakthrough in the 1980s. To date, several organic including food waste derived nanomaterials and inorganic nanomaterials (e.g., carbon nanotubes, graphene, silica, gold, and magnetic nanoparticles) have steered the development of high-throughput and sensitive bioNEMS/MEMS-based biosensors, actuator systems, drug delivery systems and implantable/wearable sensors with desirable biomedical properties. Turning food waste into valuable nanomaterials is potential groundbreaking research in this growing field of bioMEMS/NEMS. This review aspires to communicate recent progress in organic and inorganic nanomaterials based bioNEMS/MEMS for biomedical applications, comprehensively discussing nanomaterials criteria and their prospects as ideal tools for biomedical devices. We discuss clinical applications for diagnostic, monitoring, and therapeutic applications as well as the technological potential for cell manipulation (i.e., sorting, separation, and patterning technology). In addition, current in vitro and in vivo assessments of promising nanomaterials-based biomedical devices will be discussed in this review. Finally, this review also looked at the most recent state-of-the-art knowledge on Internet of Things (IoT) applications such as nanosensors, nanoantennas, nanoprocessors, and nanobattery.

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Section: Photolithographymentioning

confidence: 99%

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

et al. 2022

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“…These qualities are a result of the hard phases, such as SiC, TiB2, and TiC, that are generated in the coatings. The microelectronic industry also uses coatings of these hard phases for MEMS components [3,4]. Like Ti, Ni based superalloys like Inconel 718 get strengthened from the γ' (Ni3(Al, Ti)) and γ'' (Ni3Nb) phase, with the γ'' phase serving as the primary strengthening phase Nanoscale multilayered TiN/SiC coatings are widely used as protective coatings and in the microelectronics industry.…”

Section: Introductionmentioning

confidence: 99%

Effect of compositional variations and static-sliding indentation on Titanium based multi-phased composites and coatings

Bhattacharyya

2024

Preprint

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Ti based composites and coatings in the form of TiAl-TaN and TiBSiC were analyzed by means of nanoindentation and scratch tests. The variation of TaN wt% in TiAl was found to get indulged in dissolution and re growth and in the process showed its diffusion barrier properties as well. The scratch adhesion tests performed showed the coating vulnerability in term positional difference in crack stability

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“…Being subject to harsh operating condition, the coatings when applied to any device should possess suitable mechanical stability in terms of adhesion and interfacial toughness. [3][4][5][6] The primary objective of this communication is to demonstrate the adhesive and fracture response of these coatings using static and sliding indentation at the nanometer scale. Nanoindentation and scratch tests were used to investigate the cracking phenomenon.…”

Section: Introductionmentioning

confidence: 99%

Fracture associated with static and sliding indentation of multicomponent hard coatings on silicon substrates

Dash

Bhattacharyya²,

Bhattacharyya

2023

Fatigue Fract Eng Mat Struct

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Development of titanium nitride thin film microheaters using laser micromachining

Cited by 14 publications

References 22 publications

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

Role of Nanomaterials in the Fabrication of bioNEMS/MEMS for Biomedical Applications and towards Pioneering Food Waste Utilisation

Effect of compositional variations and static-sliding indentation on Titanium based multi-phased composites and coatings

Fracture associated with static and sliding indentation of multicomponent hard coatings on silicon substrates

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