Plasma‐Beam Discharge with a Pipe‐like Electron Beam as the Generator of Large Flows of Active Radicals

Atamanov, V.M.; Levadny, G. B.; Ivanov, А.А.; Nasedkin, Yu. F.; Sereda, Y. V.; Serov, A. O.; Timchenko, N.N.

doi:10.1002/ctpp.19820220607

Cited by 3 publications

(1 citation statement)

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“…In the second set of experiments, carried out using the PLAST beam-plasma discharge facility [8], a Be-target coated with a mixed Be + C layer was exposed to stationary 100-eV deuterium (D) plasma flux of a 10 21 -m À2 s À1 intensity to a dose of 10 24 m À2 . To model the expected heat load on the ITER first wall (5 MW m À2 ), we enhanced the applied power with an electron beam.…”

Section: Methodsmentioning

confidence: 99%

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

Guseva

Gureev

Danelyan

et al. 2004

Journal of Nuclear Materials

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Section: Methodsmentioning

confidence: 99%

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

Guseva

Gureev

Danelyan

et al. 2004

Journal of Nuclear Materials

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On the Kinetics of the Active Zone of the Stationary SF₆ Beam Discharge Plasma

Winkler¹,

Wilhelm²,

Иванов³

et al. 1985

Contrib Plasma Phys

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dbstract The paper deals with the impact of intensive electron nttachment on the kinetics of the electrons in the active zone of the stationary band-like beam discharge plasma in SF, which is an alternative useful plasma medium for "dry etching". The energy distribution of the electrons in this plasma was obtained by numerically solving the Boltzmann equation which includes apart from elastic collisions, different exciting collision processes, nttachment in electron collisions, direct ionization, the ambipolar loss of electrons, Coulomb interaction between electrons and of electrons with ions and the power input to the electrons by the turbulent electric field. In particular, due to the needed fulfilment of the consistent electron particle balance, for an extended region of the turbulence energy density in this plasma n large impact on the electron kinetics of the intensive electron attachment, which is the prevailing electron loss process, was found enforcing independent of the turbulence energy density always a large power input to the electrons, smooth and only slowly decreasing energy distributions even in the energy region of direct ionization.

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Effect of an external RF field on the beam-plasma discharge in a magnetic field

et al. 2000

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Plasma‐Beam Discharge with a Pipe‐like Electron Beam as the Generator of Large Flows of Active Radicals

Cited by 3 publications

References 1 publication

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

On the Kinetics of the Active Zone of the Stationary SF₆ Beam Discharge Plasma

Effect of an external RF field on the beam-plasma discharge in a magnetic field

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Plasma‐Beam Discharge with a Pipe‐like Electron Beam as the Generator of Large Flows of Active Radicals

Cited by 3 publications

References 1 publication

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

Study of hydrogen isotope interaction with beryllium and carbon surfaces under their simultaneous exposure to stationary and powerful pulsed plasma

On the Kinetics of the Active Zone of the Stationary SF6 Beam Discharge Plasma

Effect of an external RF field on the beam-plasma discharge in a magnetic field

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On the Kinetics of the Active Zone of the Stationary SF₆ Beam Discharge Plasma