Abstract:dbstract The paper deals with the impact of intensive electron nttachment on the kinetics of the electrons in the active zone of the stationary band-like beam discharge plasma in SF, which is an alternative useful plasma medium for "dry etching". The energy distribution of the electrons in this plasma was obtained by numerically solving the Boltzmann equation which includes apart from elastic collisions, different exciting collision processes, nttachment in electron collisions, direct ionization, the ambipolar… Show more
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