Plasma-assisted deposition of lithium phosphorus oxynitride films: Substrate bias effects

Kim, Yoon Gu; Wadley, H.N.G.

doi:10.1016/j.jpowsour.2008.11.070

Cited by 22 publications

(14 citation statements)

References 25 publications

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“…The ionic conductivity (σ) of the films was approximately 1.02 µS/cm, which is consistent with other deposition processes [1][2][3][4][5][6]. A thin film battery assembled with lipon deposited by PE-MOCVD shows a capacity was ca.…”

Section: Introductionsupporting

confidence: 82%

“…However, using this method, thermal residual stresses can cause the films to crack under tensile stress, which leads to cell failure. Lipon thin films have also been deposited by Wadley et al [6] using a plasma-assisted direct vapor deposition (PA-DVD) approach. This approach produces localized crystalline structure, which decreases the ionic conductivity.…”

Section: Introductionmentioning

confidence: 99%

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Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Meda

2011

MRS Proc.

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Lithium phosphorus oxynitride (Lipon) thin films have been deposited by a plasmaenhanced metalorganic chemical vapor deposition (PE-MOCVD) method using triethyl phosphate [(CH 2 CH 3 ) 3 PO 4 ] and lithium tert-butoxide [(LiOC(CH 3 ) 3 ] precursors. Growth rates were between 100 and 415 Å/min, and thicknesses ranged from 1 to 2.5 µm. X-ray powder diffraction showed that the films were amorphous, and X-ray photoelectron spectroscopy revealed approximately 6.9 at.% carbon in the films. The ionic conductivity of Lipon was measured using electrochemical impedance spectroscopy (EIS) and approximately 1.02 µS/cm was obtained, which is consistent with the ionic conductivity of Lipon deposited by radio frequency magnetron sputtering of Li 3 PO 4 targets. An all-solid-state thin-film lithium microbattery such as Li/Lipon/LiCoO 2 /Au/substrate was successfully fabricated with Lipon deposited by PE-MOCVD. The battery has a capacity of ca. 22 µAh/cm 2 µm.

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Section: Introductionsupporting

confidence: 82%

Section: Introductionmentioning

confidence: 99%

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Meda

2011

MRS Proc.

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“…Since the ionic conductivity in the lithium solid electrolyte is still lower than the silver electrolyte; several improvements need to be performed in order to increase the ionic conductivity, such as by (i) mixing the silver salts into lithium techniques such as AgX-LiPO 3 (X=I, Br, S); 4,5) or by decreasing the particle into nano size via ball milling or sonochemistry, 7) or by ion implantation technique, where the Li + ions the matrix of lithium glass. 8,9) Some of them have been performed by our research group, but will not be discussed in this article.…”

Section: Characterizationmentioning

confidence: 99%

Recent Studies on Lithium Solid Electrolytes (LiI)_x(LiPO₃)_1-xfor Secondary Battery

et al. 2010

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Recently, there has been increasing demand on finding new solid electrolytes based on glassy material, due to their potential applications for solid state rechargeable battery. Superionic conducting glasses have many advantageous compared with the crystalline, or composite electrolytes, such as easy in preparation, low melting point, no grain broundary, wide composition range and easy to be formed as thin film. Among superionic glasses, the family of silver phosphate glasses (AgI) x (AgPO 3 ) 1-x and lithium phosphate glasses (LiI) x (LiPO 3 ) 1-x , are the most interested materials to be investigated. Many experiments have been performed to investigate the properties of those materials. This paper will review the recent results of the lithium glasses (LiI) x (LiPO 3 ) 1-x , such as the preparation, appearance, structure, electrical and thermal properties. The x-ray data shows the precipitate occured at x=0.4, indicating the solubility limit of (LiI) x (LiPO 3 ) 1-x was reached at this composition. The microstructure data observed by SEM showed the different area between the smooth surface for x=0.3 and appearance of cluster at x=0.4. Comparison between glassy LiPO 3 and (LiI) 0.3 (LiPO 3 ) 1-x as the result of Raman spectra analysis, suggested a new feature at around 1000 cm -1 , indicating the depolymerization of the non bridging oxygen, due to the presence of LiI component. The room temperature conductivities of (LiI) x (LiPO 3 ) 1-x with x=0.3 and 0.4 are 2.7x10 -6 and 8.8x10 -7 S/cm, respectively, which are 3 orders of magnitudes higher than the undoped glass LiPO 3 . In general, the silver glass has better ionic conductivity than the lithium glass; but in application the lithium battery has better performance and produces higher voltage.

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“…LiPON was first developed by Bates et al [11][12][13][14][15][16][17][18][19] by sputtering a Li 3 PO 4 target under a N 2 atmosphere. It has already been employed for fabrication of thin-film batteries [20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target

et al. 2011

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Plasma-assisted deposition of lithium phosphorus oxynitride films: Substrate bias effects

Cited by 22 publications

References 25 publications

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Recent Studies on Lithium Solid Electrolytes (LiI)_x(LiPO₃)_1-xfor Secondary Battery

A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target

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Plasma-assisted deposition of lithium phosphorus oxynitride films: Substrate bias effects

Cited by 22 publications

References 25 publications

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Plasma-Enhanced Metalorganic Chemical Vapor deposition of Lipon Thin Films

Recent Studies on Lithium Solid Electrolytes (LiI)x(LiPO3)1-xfor Secondary Battery

A lithium phosphorous oxynitride (LiPON) film sputtered from unsintered Li3PO4 powder target

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Product

Resources

About

Recent Studies on Lithium Solid Electrolytes (LiI)_x(LiPO₃)_1-xfor Secondary Battery