Abstract:A multielectrode array coupled complementary metal oxide semiconductor (CMOS) image sensor (MARC sensor) was developed for an in vitro electrophysiology experiment. The sensor chip was fabricated by a standard CMOS process, and has a 64 microelectrode array and a 180×180 photodiode pixel array. The size of an on-chip microelectrode is 60×60 µm2 and the pixel size is 7.5×7.5 µm2. In addition, Pt black was fabricated on microelectrodes to obtain stimulation electrodes. The imaging function was demonstrated by th… Show more
“…In the previous work, we have developed a CMOS image sensor that bares on-chip microelectrodes for simultaneous contact imaging and electrical recordings from a mouse hippocampus slice [3]. The surface of the sensor chip is composed of the pasivation layer (SiN and SiO).…”
Section: Led Assembly Onto Cmos Image Sensor Microelectrodes On the Pmentioning
“…In the previous work, we have developed a CMOS image sensor that bares on-chip microelectrodes for simultaneous contact imaging and electrical recordings from a mouse hippocampus slice [3]. The surface of the sensor chip is composed of the pasivation layer (SiN and SiO).…”
Section: Led Assembly Onto Cmos Image Sensor Microelectrodes On the Pmentioning
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