2014
DOI: 10.1134/s1063782614100194
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Planar light-emitting microcavities based on hydrogenated amorphous silicon carbide

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Cited by 6 publications
(1 citation statement)
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“…To deposit a-SiO 2 , silane was strongly diluted with oxygen. Other details of the technological process have been described in our previous communications [32][33][34][35] . The optical thickness of the layers in the structure were monitored in situ by the interference pattern appearing when the intensity of the laser beam re- flected from the surface of a growing film was detected.…”
Section: Samples: Fabrication and Characterizationmentioning
confidence: 99%
“…To deposit a-SiO 2 , silane was strongly diluted with oxygen. Other details of the technological process have been described in our previous communications [32][33][34][35] . The optical thickness of the layers in the structure were monitored in situ by the interference pattern appearing when the intensity of the laser beam re- flected from the surface of a growing film was detected.…”
Section: Samples: Fabrication and Characterizationmentioning
confidence: 99%