High contrast distributed Bragg reflectors based on Si:H/SiC:H PECVD multilayer structure

Martinez, H.E.; Kosarev, A.; Певцов, А. Б.; Zherzdev, A.V.; Феоктистов, Н. А.; Kudriavtsev, Yuriy

doi:10.1109/iceee.2016.7751225

2016 13th International Conference on Electrical Engineering, Computing Science and Automatic Control (CCE) 2016

DOI: 10.1109/iceee.2016.7751225

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High contrast distributed Bragg reflectors based on Si:H/SiC:H PECVD multilayer structure

H.E. Martinez

A. Kosarev

А. Б. Певцов

et al.

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High contrast distributed Bragg reflectors based on Si:H/SiC:H PECVD multilayer structure

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