1995
DOI: 10.1109/68.473488
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Planar InP-InGaAs single-growth avalanche photodiodes with no guard rings

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Cited by 22 publications
(9 citation statements)
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“…However, the consensus that planar structures are more reliable than mesa-type photodiodes spurred the development of planar configurations. Some of the techniques that have been successfully demonstrated utilize a lateral extended guard ring [18]- [20], floating guard rings [21]- [24], pre-etched charge sheet with regrowth [25], etched diffusion well [26], or selective ion implantation of the charge region [15]. Each of these approaches has been successful in suppressing an edge breakdown.…”
Section: Introductionmentioning
confidence: 99%
“…However, the consensus that planar structures are more reliable than mesa-type photodiodes spurred the development of planar configurations. Some of the techniques that have been successfully demonstrated utilize a lateral extended guard ring [18]- [20], floating guard rings [21]- [24], pre-etched charge sheet with regrowth [25], etched diffusion well [26], or selective ion implantation of the charge region [15]. Each of these approaches has been successful in suppressing an edge breakdown.…”
Section: Introductionmentioning
confidence: 99%
“…Previous studies on avalanche photodiodes (APDs), which require a tighter design to make them reliable, have focused on how to confine the electric field into the central region of the device [7][8][9]. The basic idea for a device structure to confine the electric field in the center of the device is to form a selectively doped region at the undoped layer [10][11][12][13]. Figure 2a shows a representative APD structure using selective diffusion techniques.…”
Section: Inverted P-down Designmentioning
confidence: 99%
“…Tarof [133] proposed an alternative design that utilizes a surface etch. This device is called the standoff APD.…”
Section: Performance Issuesmentioning
confidence: 99%
“…Instead, devices are made with charge sheets [131,132] or by etching [133] to form guard ring-free designs. APD devices that incorporate a charge sheet are referred to as separate absorption, grading, charge sheet, and multiplication APDs (SAGCM-APDs).…”
Section: Performance Issuesmentioning
confidence: 99%