Planar diffuser/nozzle micropumps with extremely thin polyimide diaphragms

Liu, Yingwei; Komatsuzaki, Hiroki; Imai, Satomitsu; Nishioka, Yasushiro

doi:10.1016/j.sna.2011.02.009

Cited by 19 publications

(10 citation statements)

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“…Molds with two kinds of photomask patterns were designed for the actuators with a resistive heater to replace the air actuator used in the previously reported micropumps [8,9], as shown in Fig. 4.…”

Section: Mold Designmentioning

confidence: 99%

Transfer Printing of Au Micropatterns on Polyimide Films

Komori

Kosuge

Kuroda

et al. 2013

J. Photopol. Sci. Technol.

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The transfer printing of Au micropatterns onto a polyimide (PI) film was investigated, and the optimum transfer conditions were obtained. In this study, micropatterns with widths of 25 μm and 75 μm were successfully transferred onto a PI film at a molding temperature of 150 °C for 5 s under a molding pressure of 2.5 MPa. This technique is expected to provide simplified processes in fabricating wiring patterns in microelectromechanical systems.

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Section: Mold Designmentioning

confidence: 99%

Transfer Printing of Au Micropatterns on Polyimide Films

Komori

Kosuge

Kuroda

et al. 2013

J. Photopol. Sci. Technol.

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“…Micropumps fabricated with MEMS technology have been considered for use in such fuel transport mechanisms [16][17][18][19][20][21][22][23][24][25][26][27]. Liu et al reported polyimide (PI) diaphragm micropumps (15 × 15 mm 2 ) fabricated using MEMS technology [22].…”

Section: Introductionmentioning

confidence: 99%

“…Liu et al reported polyimide (PI) diaphragm micropumps (15 × 15 mm 2 ) fabricated using MEMS technology [22]. Such micropumps should be able to deliver enough glucose fuel solution to continuously generate power in a BFC.…”

Section: Introductionmentioning

confidence: 99%

A Glucose Biofuel Cell Equipped in the Fluid Reservoir of a Polyimide Diaphragm Micropump

Ishida

Fukushi

Nishioka

2015

J. Photopol. Sci. Technol.

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We fabricated a micropump with a polyimide (PI) diaphragm (53 μm thick, 7 mm diameter) on a silicon chip using microfabrication processes, and a glucose biofuel cell was inserted into the fluid chamber of the micropump. The biofuel cell was fabricated on another PI film, with glucose oxidase immobilized on its porous carbon anode and bilirubin oxidase immobilized on the porous carbon cathode. Each semicircular electrode area was 14.1 mm 2 with a radius of 3 mm, and the gap between the anode and cathode was 1 mm.The device generated electricity by feeding an aqueous solution of glucose directly onto the electrodes in the micropump chamber. The maximum generated power, 0.076 μW at 98 mV, corresponding to a power density of 0.556 μW/cm 2 , was realized when a 100 mM glucose solution was introduced under diaphragm pressures alternating between 0 and 30 kPa at a pumping frequency of 3 Hz. A longer power generation lifetime was observed under fuel flow driven by micropump operation.

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“…Jeong and Kim (2007) performed a fully transient numerical analysis that considered the interactions between the fluid and the structure and evaluated the pumping characteristics of a nozzle/diffuser-based piezoelectric micropump. Liu et al (2011) manufactured valveless nozzle/diffuser micropumps with extremely thin polyimide diaphragms and obtained relatively higher flow rates due to the large deflection amplitude of the polyimide films.…”

Section: Introductionmentioning

confidence: 99%