Piston Motion Performance Analysis of a 3DOF Electrothermal MEMS Scanner for Medical Applications

International Journal of Optomechatronics

et al. 2015

Microassembly is an innovative alternative to the microfabrication process of MOEMS which is quite complex. It usually implies the use of microrobots controlled by an operator. The reliability of this approach has been already confirmed for the micro-optical technologies. However, the characterization of assemblies has shown that the operator is the main source of inaccuracies in the teleoperated microassembly. Therefore, there is a great interest in automating the microassembly process. One of the constraints of automation in microscale is the lack of high precision sensors capable to provide the full information about the object position. Thus, the usage of visual-based feedback represents a very promising approach allowing to automate the microassembly process. The purpose of this paper is to characterize the techniques of object position estimation based on the visual data, i.e. visual tracking techniques from the ViSP library. These algorithms allows to get the 3D object pose using a single view of the scene and the CAD model of the object. The performance of three main types of model-based trackers is analyzed and quantified: edge-based, texture-based and hybrid tracker. The problems of visual tracking in microscale are discussed. The control of the micromanipulation station used in the framework of our 1 Downloaded by [New York University] at 07:50 25 July 2015 A c c e p t e d M a n u s c r i p t project is performed using a new Simulink block set. Experimental results are shown and demonstrate the possibility to obtain the repeatability below 1 m. 2

Section: Discussionmentioning

confidence: 99%

Analysis of CAD Model-based Visual Tracking for Microassembly using a New Block Set for MATLAB/Simulink

Kudryavtsev

Laurent

International Journal of Optomechatronics

et al. 2015

“…These vision tracking methods of object position estimation can be directly applied to many kinds of applications such as in the MEMS field. For example, they could be used to measure the position of the micromirror presented in [24] where sensor integration is strongly limited by available space constraints.…”

Section: Discussionmentioning

confidence: 99%

Characterization of Model-Based Visual Tracking Techniques for MOEMS Using a New Block Set for MATLAB/Simulink

Kudryavtsev

Laurent

2014 International Symposium on Optomechatronic Technologies

et al. 2014

Microassembly is an innovative alternative to the microfabrication process of MOEMS which is quite complex. It usually implies the usage of microrobots controlled by an operator. The reliability of this approach has been already confirmed for the micro-optical technologies. However, the characterization of assemblies has shown that the operator is the main source of inaccuracies in the teleoperated microassembly, so there is a great interest in automating the microassembly process. One of the constraints of automation in microscale is the lack of high precision sensors capable to provide the full information about the object position. Thus, the usage of visualbased feedback represents a very promising approach allowing to automate the microassembly process. The purpose of this paper is to characterize the techniques of object position estimation based on the visual data, i.e. visual tracking techniques from the ViSP library. These algorithms allows to get the 3D object pose using a single view of the scene and the CAD model of the object. The performance of three main types of modelbased trackers is analyzed and quantified: edge-based, texturebased and hybrid tracker. The problems of visual tracking in microscale are discussed. The control of the micromanipulation station used in the framework of our project is performed using a new Simulink block set. Experimental results are shown and demonstrate the possibility to obtain the repeatability below 1 µm.

“…It is due to the fabrication process to assure the electrical isolation between the two layers of Al and Pt via a layer of SiO2. The fabrication and optimization procedures of the ISC bimorph and the micro mirror can be found in [11] and [17].…”

Section: Presentation Of Mems Mirrormentioning

confidence: 99%

“…The modeling of the electrothermal actuated mirror is based on Espinosa et al's work [17]. The preliminary work modelled the actuator as a simple cantilever beam and presented the analytical model of the actuator.…”

Section: Actuator's Displacement During the Piston Motionmentioning

confidence: 99%

Multiphysics & Parallel Kinematics Modeling of a 3DOF MEMS Mirror

Mamat

Rabenorosoa

MATEC Web of Conferences

et al. 2015

Self Cite

Abstract. This paper presents a modeling for a 3DoF electrothermal actuated micro-electro-mechanical (MEMS) mirror used to achieve scanning for optical coherence tomography (OCT) imaging. The device is integrated into an OCT endoscopic probe, it is desired that the optical scanner have small footprint for minimum invasiveness, large and flat optical aperture for large scanning range, low driving voltage and low power consumption for safety reason. With a footprint of 2mm×2mm, the MEMS scanner which is also called as Tip-Tilt-Piston micromirror, can perform two rotations around x and y-axis and a vertical translation along z-axis. This work develops a complete model and experimental characterization. The modeling is divided into two parts: multiphysics characterization of the actuators and parallel kinematics studies of the overall system. With proper experimental procedures, we are able to validate the model via Visual Servoing Platform (ViSP). The results give a detailed overview on the performance of the mirror platform while varying the applied voltage at a stable working frequency. The paper also presents a discussion on the MEMS control system based on several scanning trajectories.