Abstract:Abstract. This paper presents a modeling for a 3DoF electrothermal actuated micro-electro-mechanical (MEMS) mirror used to achieve scanning for optical coherence tomography (OCT) imaging. The device is integrated into an OCT endoscopic probe, it is desired that the optical scanner have small footprint for minimum invasiveness, large and flat optical aperture for large scanning range, low driving voltage and low power consumption for safety reason. With a footprint of 2mm×2mm, the MEMS scanner which is also cal… Show more
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