Piezoresistive feedback for improving transient response of MEMS thermal actuators

Messenger, Robert K.; McLain, Timothy W.; Howell, Larry L.

doi:10.1117/12.657954

Cited by 8 publications

(4 citation statements)

References 11 publications

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“…The variable gain seen in PMT output plotted in Figure 10, specifically the reduced gain around the fourth measurement level, is most likely due to nonlinear effects arising from uneven heating of the PMT flexures. open-loop transient response of this TIM [32], [44], [53]. The sinusoidal input demonstrates the expected double frequency TIM response.…”

Section: Stationarymentioning

confidence: 99%

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Messenger

Aten

McLain

et al. 2009

J. Microelectromech. Syst.

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Feedback control of MEMS devices has the potential to significantly improve device performance and reliability. One of the main obstacles to its broader use is the small number of on-chip sensing options available to MEMS designers. A method of using integrated piezoresistive sensing is proposed and demonstrated as another option. Integrated piezoresistive sensing utilizes the inherent piezoresistive property of polycrystalline silicon from which many MEMS devices are fabricated. As compliant MEMS structure's flex to perform their functions, their resistance changes. That resistance change can be used to transduce the structures' deflection into an electrical signal. The piezoresistive microdisplacement transducer (PMT) is a demonstration structure that uses integrated piezoresistive sensing to monitor the output displacement of a thermomechanical inplane microactuator (TIM). Using the PMT as a feedback sensor for closed-loop control of the TIM provided excellent tracking with no evident steady-state error, maintained the positioning resolution to ±29 nm or less, and increased the robustness of the system such that it was insensitive to significant damage.

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Section: Stationarymentioning

confidence: 99%

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Messenger

Aten

McLain

et al. 2009

J. Microelectromech. Syst.

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“…Horsley, et al used linear PD and phase-lead closed-loop controllers for position control of an electrostatic lateral comb drive that was operated only within its stable range [24]. Messenger, et al performed PID and lead-control for position tracking on micromachined thermal actuators that exhibit approximately linear actuation [26,27].…”

Section: Classical Control Methodsmentioning

confidence: 99%

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

Bronson

Wiens

2007

Volume 3: 19th International Conference on Design Theory and Methodology; 1st International Conference on Micro- And Nanosystem

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This paper presents research on the development of microelectromechanical systems (MEMS) micromirror arrays with precise and accurate positioning enabled by the use of closed-loop control techniques. The MEMS mirror arrays are one degree-of-freedom, electrostatically actuated and exhibit nonlinear actuation profiles that include pull-in and hysteresis. The device performance is subject to parametric uncertainties from the fabrication process. Preliminary proportional-integrator (PI) controllers are studied in simulation on the nonlinear system to explore issues in the control development. Two different model linearization methods are presented to examine the best way to approximate the nonlinear behaviors using linear models. The effects of parametric uncertainties on the open-loop plant response are considered. It is evident based on these studies that the open-loop response is very sensitive to model uncertainties, while using closed-loop control can achieve input-tracking despite uncertainties in the plant. The work-in-progress includes the development of an optical test bed for the experimental validation of the results presented in this paper.

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“…It calculates an error as the difference between a measured process variable and a desired set point. However, high-frequency noise that occurs in a PRDS will be amplified by the derivative part of PID controller [34]. To avoid this situation, only the proportional part of PID controller is applied herein because it is simple and improves the response time of the system without amplifying the high-frequency noise.…”

Section: Controller Designmentioning

confidence: 99%

“…To overcome the disadvantages of electrostatic devices and VCMs and increase the output force, thermal actuators are designed to actuate the XY stage and perform an anti-shaking function [23]. Thermal actuators had been well developed in many applications, such as grating tuning by rhombic-shaped thermal actuator array [27], large displacement by SU8 thermal actuator [31], power efficiency increasing [32], fiber positioning assembly [33], a precisely position thermal actuator [34] and micro motors [35,36].…”

Section: Introductionmentioning

confidence: 99%

MEMS-based thermally-actuated image stabilizer for cellular phone camera

Lin

Chiou

2012

J. Micromech. Microeng.

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This work develops an image stabilizer (IS) that is fabricated using micro-electro-mechanical system (MEMS) technology and is designed to counteract the vibrations when human using cellular phone cameras. The proposed IS has dimensions of 8.8 × 8.8 × 0.3 mm 3 and is strong enough to suspend an image sensor. The processes that is utilized to fabricate the IS includes inductive coupled plasma (ICP) processes, reactive ion etching (RIE) processes and the flip-chip bonding method. The IS is designed to enable the electrical signals from the suspended image sensor to be successfully emitted out using signal output beams, and the maximum actuating distance of the stage exceeds 24.835 μm when the driving current is 155 mA. Depending on integration of MEMS device and designed controller, the proposed IS can decrease the hand tremor by 72.5%.

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Piezoresistive feedback for improving transient response of MEMS thermal actuators

Cited by 8 publications

References 11 publications

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Piezoresistive Feedback Control of a MEMS Thermal Actuator

Feedback Control of MEMS Micromirrors Subject to Parametric Uncertainty

MEMS-based thermally-actuated image stabilizer for cellular phone camera

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