MEMS-based thermally-actuated image stabilizer for cellular phone camera

Abstract

This work develops an image stabilizer (IS) that is fabricated using micro-electro-mechanical system (MEMS) technology and is designed to counteract the vibrations when human using cellular phone cameras. The proposed IS has dimensions of 8.8 × 8.8 × 0.3 mm 3 and is strong enough to suspend an image sensor. The processes that is utilized to fabricate the IS includes inductive coupled plasma (ICP) processes, reactive ion etching (RIE) processes and the flip-chip bonding method. The IS is designed to enable the electrical signals from the suspended image sensor to be successfully emitted out using signal output beams, and the maximum actuating distance of the stage exceeds 24.835 μm when the driving current is 155 mA. Depending on integration of MEMS device and designed controller, the proposed IS can decrease the hand tremor by 72.5%.

H∞Control on the Optical Image Stabilizer Mechanism in Mobile Phone Cameras

“…사용하는 방식, [5] 보이스코일 모터(voice coil motor)를 이용하는 방식, [6] MEMS로 제작한 콤드라이브(comb drive)를 사용하는 방 식 [7] 등에 대한 연구가, 스테이지 체결방식에 따라 병진조인트를 사용하는 방식, [8] 볼베어링을 사용하는 방식, [9] 와이어 서스펜션을 사용하는 방식 [10] 에 …”