Piezoresistance effect of silicon

Kanda, Yozo

doi:10.1016/0924-4247(91)85017-i

Cited by 346 publications

(216 citation statements)

References 20 publications

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“…100 ) is larger than the dimensional changes by a factor of 50, thus the latter can be ignored. 16 In case of a uniaxial stress (σ ) and parallel current flow, the relative resistance change is…”

Section: B Sensitivity: Electromechanical Modelmentioning

confidence: 99%

“…In order to maximize the devices sensitivity, the cantilevers are oriented along the non-standard 100 direction on the wafer surface. 16 A common denominator of different fabrication technologies is the need of testing large number of devices across several wafers. This need is not specific to MEMS and wafer scale testing has been used over the years to test electronic devices.…”

Section: Introductionmentioning

confidence: 99%

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Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Tosolini

Villanueva

Pérez‐Murano

et al. 2012

Review of Scientific Instruments

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Validation of a technological process requires an intensive characterization of the performance of the resulting devices, circuits, or systems. The technology for the fabrication of micro and nanoelectromechanical systems (MEMS and NEMS) is evolving rapidly, with new kind of device concepts for applications like sensing or harvesting are being proposed and demonstrated. However, the characterization tools and methods for these new devices are still not fully developed. Here, we present an on-wafer, highly precise, and rapid characterization method to measure the mechanical, electrical, and electromechanical properties of piezoresistive cantilevers. The setup is based on a combination of probe-card and atomic force microscopy technology, it allows accessing many devices across a wafer and it can be applied to a broad range of MEMS and NEMS. Using this setup we have characterized the performance of multiple submicron thick piezoresistive cantilever force sensors. For the best design we have obtained a force sensitivity ℜF = 158μV/nN, a noise of 5.8 μV (1 Hz–1 kHz) and a minimum detectable force of 37 pN with a relative standard deviation of σr ≈ 8%. This small value of σr, together with a high fabrication yield >95%, validates our fabrication technology. These devices are intended to be used as bio-molecular detectors for the measurement of intermolecular forces between ligand and receptor molecule pairs.

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Section: B Sensitivity: Electromechanical Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Fast on-wafer electrical, mechanical, and electromechanical characterization of piezoresistive cantilever force sensors

Tosolini

Villanueva

Pérez‐Murano

et al. 2012

Review of Scientific Instruments

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“…For a first calculation, we used the following parameters: ␤Ϸ0.8 and L Ϸ4.5ϫ10 Ϫ10 m 2 N Ϫ1 . 4,16 These quantities are subject to some fluctuations related to the microfabrication process.…”

Section: A Two-leg Levermentioning

confidence: 99%

“…The inevitable temperature dependence of the piezoresistive coefficient L and of the resistance itself also affect the sensitivity. 16 From the voltage noise level observed during the calibration process, the typical resolution of the device can be estimated. In the dynamic regime, the resolution is about 10 Ϫ14 Nm, whereas for the static regime it reaches 10…”

Section: B Calibration and Resolutionmentioning

confidence: 99%

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Piezoresistive cantilever designed for torque magnetometry

Willemin

Rossel

Brügger

et al. 1998

Journal of Applied Physics

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New piezoresistive silicon cantilevers designed specifically for torque magnetometry on microscopic samples have been microfabricated and tested. These levers have been optimized to detect the torque in two directions corresponding to flexion and torsion. Torque resolution of ϳ10 Ϫ14 N m can be achieved depending on the operating mode. In one version an integrated loop allows an absolute calibration of the device with an accuracy of ϳ1%. This loop can also be used to excite the lever mechanically. One application is the determination of the mass of nanogram samples by measuring the resonance frequency shift ͑nanobalance͒.

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