Piezoresistive cantilever designed for torque magnetometry

Abstract

New piezoresistive silicon cantilevers designed specifically for torque magnetometry on microscopic samples have been microfabricated and tested. These levers have been optimized to detect the torque in two directions corresponding to flexion and torsion. Torque resolution of ϳ10 Ϫ14 N m can be achieved depending on the operating mode. In one version an integrated loop allows an absolute calibration of the device with an accuracy of ϳ1%. This loop can also be used to excite the lever mechanically. One application is the determination of the mass of nanogram samples by measuring the resonance frequency shift ͑nanobalance͒.

Torque magnetometry study of metamagnetic transitions in single-crystalHoNi2B2CatT≈1.9Rathnayaka1, Белевцев2, Naugle3 2007Phys. Rev. B4260View full textAdd to dashboardCite

“…It is known [19] (but usually not taken into account) that at large torque the orientation change of the sample due to twisting of the cantilever itself is no longer negligible. This can cause an error in angular position of the high-field metamagnetic transitions.…”

Unconventional isotope effects in the high-temperature cuprate superconductors

“…In this case, commercial SQUID magnetometers do not have enough sensitivity to measure the magnetization for such tiny crystals especially near T c . Fortunately our highly sensitive torque magnetometer [41] is able to detect the small diamagnetic signal for the tiny crystals.…”

Piezoresistive cantilevers for nanomechanical sensing

“…Willemin, Brugger and co-workers developed piezoresistive cantilevers for torque magnetometry, based on two and three legged cantilevers for measuring flexion and torsion independently (Fig. 5d) [71,100]. Grabiec, Rangelow and co-workers developed cantilevers with conductive microtips isolated from the cantilever for electrostatic force microscopy and scanning capacitance microscopy [101], and piezoresistive scanning near field optical microscopy (SNOM) probes [102,103].…”