Piezoelectric ultrasonic transducer based on flexible AlN

Mastronardi, Vincenzo Mariano; Guido, Francesco; Amato, Massimiliano; Vittorio, Massimo De; Petroni, Simona

doi:10.1016/j.mee.2014.03.034

Cited by 50 publications

(40 citation statements)

References 4 publications

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“…As reported by Mastronardi et al [28], a pMUT consisting of flexible piezoelectric membranes of AlN (with a thickness of 800

normaln normalm

) is fabricated on 25

sans-serifμ normalm

-thick Kapton flexible substrate by exploiting the same technology of tactile sensors and the inverse piezoelectric effect. The final transducers (shown in Figure 18a,b) have a radius of 250, 275 and 300

sans-serifμ normalm

.…”

Section: Results and Applicationsmentioning

confidence: 99%

“…In an analogous manner, AlN/Mo-based multilayers grown on a flexible polyimide substrate release tensile stress by an upward deflection reaching approximately 40

sans-serifμ normalm

for a diameter of 350

sans-serifμ normalm

[27]. Consequently, structural elements based on AlN/Mo or Mo/AlN/Mo multilayers can be used for bent structures, such as beams and membranes [26,27,28]. …”

Section: Methodsmentioning

confidence: 99%

“…A different process was reported by Mastronardi et al [27,28]. They designed and fabricated aluminum nitride-based domed circular membranes using the following standard microfabrication process.…”

Section: Methodsmentioning

confidence: 99%

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Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

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The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described.

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“…As reported by Mastronardi et al [28], a pMUT consisting of flexible piezoelectric membranes of AlN (with a thickness of 800

normaln normalm

) is fabricated on 25

sans-serifμ normalm

sans-serifμ normalm

.…”

Section: Results and Applicationsmentioning

confidence: 99%

“…In an analogous manner, AlN/Mo-based multilayers grown on a flexible polyimide substrate release tensile stress by an upward deflection reaching approximately 40

sans-serifμ normalm

for a diameter of 350

sans-serifμ normalm

[27]. Consequently, structural elements based on AlN/Mo or Mo/AlN/Mo multilayers can be used for bent structures, such as beams and membranes [26,27,28]. …”

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Abels

Mastronardi

Guido

et al. 2017

Sensors

Self Cite

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“…The Mo bottom electrode has been patterned by wet etching with hydrogen peroxide solution (30%). Subsequently, molybdenum top electrodes (250 nm) have been structured by lift-off technique (details on microfabrication are reported elsewhere 13,14,23 ). A parylene C coating of 1 lm has been deposited via CVD deposition as protective layer to prevent external damages and to electrically isolate the transducers.…”

mentioning

confidence: 99%

“…1(b) shows that the release of the compressive residual stress of the thin layers generates a dome structure on the polymer after dry etching. 23 The domes are lifted up with an average height of h m ¼ 38 6 5 lm over the substrate base (blue region in Fig. 1(b)).…”

mentioning

confidence: 99%

Low stiffness tactile transducers based on AlN thin film and polyimide

Mastronardi

Ceseracciu

Guido

et al. 2015

Applied Physics Letters

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In this paper, we propose a flexible piezoelectric MEMS transducer based on aluminum nitride thin film grown on polyimide soft substrate and developed for tactile sensing purposes. The proposed device consists of circular micro-cells, with a radius of 350 lm, made of polycrystalline c-axis textured AlN. The release of compressive stress by crystalline layers over polymer substrate allows an enhanced transduction response when the cell is patterned in circular dome-shaped geometries. The fabricated cells show an electromechanical response within the full scale range of 80 mN ('200 kPa) both for dynamic and static load. The device is able to detect dynamic forces by exploiting both piezoelectric and flexoelectric capabilities of the aluminum nitride cells in a combined and synergistic sensing that occurs as voltage generation. No additional power supply is required to provide the electrical readout signals, making this technology suitable candidate when low power consumption is demanding. Moreover a capacitance variation under constant stress is observed, allowing the detection of static forces. The sensing ability of the AlN-based cells has been tested using an ad hoc setup, measuring both the applied load and the generated voltage and capacitance variation. V C 2015 AIP Publishing LLC. [http://dx.Artificial tactile systems for pressure and force measurements are important in many applications as automated assembling, machining, sorting, and stacking production; in minimal invasive medical procedures (MIS) for the evaluation of tissues stiffness and damages; in prosthetic and orthotic devices where artificial skin restores loss of tactile sensations. Similarly, humanoid robots need tactile interface devices for a safe interaction with humans in assisting activities. Equipping a robot with specific sensors and transducers is a way to confer him sufficient autonomy to perform tasks in unstructured environments. Unlike other senses, tactile sensory system provides information on physical properties of different nature such as shape, texture, and stiffness (to control the manipulation with optimal forces), which is not easily achieved by vision alone. Also during grasping and manipulation of objects, the right tactile perception prevents slippage and damage (ensuring the manual dexterity in a robotic system). An artificial tactile system that emulates these abilities and performs advanced in-hand manipulation tasks should detect dynamic forces, such as normal and tangential contact for gathering spatial and geometrical information from surfaces exploration, as well as static forces. To this aim, arrays of pressure-sensitive sensors should be integrated on the robot fingertips as an electronic skin and flexibility and stretchability are desirable properties to increase the anthropomorphism.In the last decades, several technological approaches have been used to realize a low-cost, large-area-compatible artificial skin, suitable for object manipulation, and with sufficient sensitivity in a wide pressure range (10-100 kPa...

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Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (Y_xAl_1‐xN) Thin Films

Pandit,

Schneider,

Schwarz

et al. 2023

Adv Eng Mater

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Alloying rare earth elements into aluminum nitride (AlN) thin films to increase the piezoelectric response has gained a lot of attention in the past few years. Many rare earth elements were investigated in which scandium alloying has resulted in the highest piezoelectric response for AlN. At the same time, researchers have also theoretically explored yttrium alloying as a feasible and economical alternative to scandium. In this paper, we demonstrate for the first time experimentally the increase of the piezoelectric response of sputter‐deposited YxAl1–xN thin films as a function of increasing yttrium concentration as predicted by density functional theory calculations. By using differently manufactured targets, YxAl1–xN thin films with four different yttrium alloying concentrations (9, 12, 15 and 20 at%.) are synthesized. Detailed thin film analysis is carried out and the highest value of d 33 measured is 12 pC/N for Y0.2Al0.8N, which is a 250 % increase compared to pure AlN. Even more, the Young’s modulus decreases with increasing yttrium concentration in excellent agreement with theoretical predictions. Finally, Y0.15Al0.85N and Y0.2Al0.8N layers show high crystalline stability in pure oxygen environment up to 800˚C, demonstrating high oxidation resistance even under harsh environmental conditions.This article is protected by copyright. All rights reserved.

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Piezoelectric ultrasonic transducer based on flexible AlN

Cited by 50 publications

References 4 publications

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Low stiffness tactile transducers based on AlN thin film and polyimide

Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (Y_xAl_1‐xN) Thin Films

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Piezoelectric ultrasonic transducer based on flexible AlN

Cited by 50 publications

References 4 publications

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

Low stiffness tactile transducers based on AlN thin film and polyimide

Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (YxAl1‐xN) Thin Films

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Enhancement of Piezoelectric Response in Yttrium Aluminum Nitride (Y_xAl_1‐xN) Thin Films