2003
DOI: 10.1088/0964-1726/12/2/304
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Piezoelectric resonating structures for microelectronic cooling

Abstract: The design of piezoelectric resonating structures was investigated for generating acoustic streaming which may be used for cooling microelectronic components. The vibration characteristics of different piezoelectric structures were simulated by the finite element method and validated with analytical approaches. Considering the product of resonance frequency and dynamic tip deflection as a performance merit, the effects of length and location of the actuators as well as the boundary conditions were analyzed for… Show more

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Cited by 25 publications
(17 citation statements)
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“…Piezofans were first investigated in the late 1970s [10]. In the last few years the demand for portable electronic devices has brought interest in the use of piezofans as a compact, low power, noiseless air cooling technology for applications such as laptop computers and DVD players [11,12]. Since piezofans are compact in size (i.e., ~10mm in chord length) and can generate large flapping amplitude (~25mm) at very high flapping frequency (60Hz~110Hz), which naturally point to the potential applications of employing piezofans as gearless flapping-wings for NAV designs [13][14].…”
Section: Introductionmentioning
confidence: 99%
“…Piezofans were first investigated in the late 1970s [10]. In the last few years the demand for portable electronic devices has brought interest in the use of piezofans as a compact, low power, noiseless air cooling technology for applications such as laptop computers and DVD players [11,12]. Since piezofans are compact in size (i.e., ~10mm in chord length) and can generate large flapping amplitude (~25mm) at very high flapping frequency (60Hz~110Hz), which naturally point to the potential applications of employing piezofans as gearless flapping-wings for NAV designs [13][14].…”
Section: Introductionmentioning
confidence: 99%
“…Piezofans were first investigated in the late seventies [12]. In the last few years the demand for portable electronic devices has brought interest in the use of piezofans as a compact, low power, noiseless air cooling technology for applications such as laptop computers and DVD players [13,14]. We have investigated the optimization and characterization of individual piezofan structure at quasi-static and dynamic operations in a separate report [15].…”
Section: Introductionmentioning
confidence: 99%
“…The application of piezoelectric materials in sensors and actuators for actuating and controlling the smart structures were extensively studied by Crawly and Luis [2]. The potential convective heat transfer capability of an UFW generated by direct and inverse piezoelectric effect was experimentally investigated by Wu et al [3] and Loh et al [4]. Yoo et al [5] developed several types of piezoelectric fans using PZT, one of which resulted in a fan tip deflection of 3.55cm and air velocity of 3.Im/s measured O.Icm away from the tip.…”
Section: Introductionmentioning
confidence: 99%