Piezoelectric P(VDF-TrFE) micro cantilevers and beams for low frequency vibration sensors and energy harvesters

Rashmi, K.R.; Rao, Arjun Sunil; Jayarama, A.; Pinto, R.

doi:10.1016/j.sna.2019.06.021

Cited by 17 publications

(8 citation statements)

References 24 publications

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“…In this work, the dimensions of the microcantilever were chosen such that the resonance frequency of the first flexural mode is found at low frequencies in the range of 10 kHz, allowing the excitation and investigation of even higher flexural modes of the microcantilever. Furthermore, it was intended to realise a micromachined ferroelectric polymer cantilever in order to demonstrate the potential of P(VDF-TrFE) for MEMS resonators given only few studies in literature [21][22][23][24][25]. However, since the integration of a ferroelectric polymer into the batch process of a micromachined silicon cantilever is not straightforward, we present details of the fabrication process in the supplementary material.…”

Section: Methodsmentioning

confidence: 99%

“…Flexible and soft materials, such as the ferroelectric or piezoelectric copolymer P(VDF-TrFE), have found an increasing number of applications in MEMS devices [21][22][23][24][25][26]. Due to the low stiffness of polymers compared to inorganic materials, low frequency applications for e.g.…”

Section: Introductionmentioning

confidence: 99%

“…However, the integration of ferroelectric polymer thin films into a standard silicon MEMS fabrication process is challenging, as typically strong chemicals or etchants are used that may attack this organic material. For this reason, there are only few reports on the fabrication of ferroelectric polymer MEMS devices in literature [21][22][23][24][25]. In this work, we present a fabrication process for ferroelectric polymer microcantilevers by applying standard microfabrication techniques.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Hafner

Teuschel

Disnan

et al. 2021

Materials Research Letters

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Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties. IMPACT STATEMENT The non-linear nature of the strong electrostrictive effect observed in ferroelectric polymers was used to enhance and control its piezoelectric activity by an electric field. A large and tunable piezoelectric response was verified in polymer-based MEMS resonators, proving the ability to tailor their actuating and sensing properties.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Hafner

Teuschel

Disnan

et al. 2021

Materials Research Letters

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“…Wang et al combine PDMS/MWCNT thin composite membrane with P(VDF-TrFE) nanofibers, which realizes both piezoelectric and triboelectric energy harvesting [ 33 ]. Rashmi et al [ 34 ] developed a new Si bulk-based micromachining process for MEMS fabrication. The simulation agrees well with the experiment outcome, and the method has the potential for low-frequency energy harvester development.…”

Section: Introductionmentioning

confidence: 99%

Improved Design via Simulation of Micro-Modified PVDF and Its Copolymer Energy Harvester with High Electrical Outputs

Liu

Huang

Liu

2020

Sensors

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In this work, micro-modified polyvinylidene fluoride (PVDF) and its copolymer poly(vinylidene-trifluoroethylene) (P(VDF-TrFE)) with salient enhancement in current output are demonstrated. The influence of surface-modified structure characteristics on electrical properties of energy harvester is systematically analyzed based on the finite element method. For vertical load mode, eight structures consisting of banded and disjunctive groups are compared to evaluate the voltage performance. The cylinder is proved to be the best structure of 3.25 V, compared to the pristine structure of 0.99 V (P(VDF-TrFE)). The relevant experiment has been done to verify the simulation. The relationship between radius, height, force and distance to the voltage output of the cylinder allocation is discussed. For periodical changing load mode, the cylinder modified structure shows a conspicuous enhancement in current output. The suitable resistance, current–voltage and frequency, the relationship between loading speed and current, and the ductility of current loading are studied. For 30 kHz, the peak current is 20 times larger than the flat plate structure. Tip shape mode and fusiform shape mode are found, which show the different shapes of the peak current-frequency curves. Four electrical loading circuit properties are also discussed: the suitable resistance of the system, synchronism of current and voltage, time delay nature of energy harvester and current-loading relationship. The simulation results can provide some theoretical basis for designing the energy harvester and piezoelectric nanogenerator (PENG).

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“…These scavengers are considered as sources of environmentally friendly electric power and became a viable and promising supplement or sometimes even a replacement option for batteries. Kinetic energy of motion is one of the most popular source choices, due to a good number of relatively compact scavenging technologies based on piezoelectric materials, electromagnetic harvesters, or electrostatic devices . All of the above techniques are capable of converting mechanical motion, such as vibrations, into electricity in a relatively simple and straightforward way …”

Section: Introductionmentioning

confidence: 99%

Optimization of electromagnetic and vibration energy harvesters utilizing flexible piezoelectric cantilever beams

Noras

2020

Int J Energy Res

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Summary The main goal of work presented in this manuscript was to design and build energy harvesters optimized for maximum electric power output, utilizing flexible piezoelectric cantilever beam structures available on the commercial market. The devices were constructed to simultaneously harvest magnetic field and vibration energies present in vicinity of current‐carrying conductors, such as those used in power lines. Gradient‐free Nelder‐Mead optimization algorithm was used to find geometries that maximized the power output from the harvesters, tuning them to 60‐Hz electric frequency of the AC current flowing in the energized line. The harvesters' electric load was also adjusted to assure the optimal energy transfer. The findings were then used to build harvesters. The optimization process allowed to achieve power densities up to 35.6 mW/cm3 from the constructed scavengers.

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Piezoelectric P(VDF-TrFE) micro cantilevers and beams for low frequency vibration sensors and energy harvesters

Cited by 17 publications

References 24 publications

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators

Improved Design via Simulation of Micro-Modified PVDF and Its Copolymer Energy Harvester with High Electrical Outputs

Optimization of electromagnetic and vibration energy harvesters utilizing flexible piezoelectric cantilever beams

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