2021 IEEE International Ultrasonics Symposium (IUS) 2021
DOI: 10.1109/ius52206.2021.9593772
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Piezoelectric over Silicon-on-Nothing (pSON) process

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Cited by 17 publications
(5 citation statements)
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“…The chip bearing the suspended membrane waveguide is a 3 mm × 3 mm microfabricated silicon chip from the piezoelectric over silicon-on-nothing process (pSON), 71 Fig. 2C.…”
Section: Methodsmentioning
confidence: 99%
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“…The chip bearing the suspended membrane waveguide is a 3 mm × 3 mm microfabricated silicon chip from the piezoelectric over silicon-on-nothing process (pSON), 71 Fig. 2C.…”
Section: Methodsmentioning
confidence: 99%
“…The device is a bulk Si chip featuring a 2 μm-thick Si membrane formed via the pSON process. 71 The membrane has a width of 100 μm that is constant across the device and forms a rectangular closed-loop with rounded corners (Fig. 2A).…”
Section: Device Design and Principlesmentioning
confidence: 99%
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“…The piezoelectric Silicon-On-Nothing (pSON) 71 process is used to fabricate the thin suspended membrane forming the waveguide. This process requires a high-temperature annealing step to induce silicon migration inside the patterned substrate, effectively sealing off a seamless vacuum cavity buried inside the bulk silicon.…”
Section: Description Of the Mawamentioning
confidence: 99%
“…1d. The complex and detailed structures realized by the piezoelectric Silicon-On-Nothing (pSON) 71 process allows for the MAWA to distinguish itself from the exural plate wave transducers reported by White's group by leveraging the waveguiding property of a photolithographically-de ned membrane 72 and further develop the capabilities of localized GFWs in acousto uidics.…”
Section: Introductionmentioning
confidence: 99%