Piezoelectric Motor Utilizing an Alumina/PZT Transducer

Wu, Jiang; Mizuno, Yosuke

doi:10.1109/tie.2019.2937047

Cited by 39 publications

(17 citation statements)

References 47 publications

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“…Moreover, the PZT thick film micro vibrator was ring shaped, which was able to produce a rotary traveling wave in the elastic body. As shown in Figure 1 a,b, the outer diameter D 1 of the elastic body of the piezoelectric vibrator was preliminary designed to be 4.3 mm, reducing the size of the piezoelectric vibrator and benefiting the maintenance of torque related to the outer diameter [ 31 ]. The thickness of the elastic body was determined to be 550 μm; the thickness of the PZT thick film element H 2 was 35 μm; the diameter of the middle hole D 3 for aligning and fixing the vibrator was 1100 μm; and the teeth thickness H 1 was 250 μm.…”

Section: Methodsmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

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This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.

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Section: Methodsmentioning

confidence: 99%

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

et al. 2021

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“…Frequency response characteristics, displacement, and electromechanical coupling coefficients were calculated and compared with a finite element approach; the experimental results verified the model's impact. Alumina was used in Wu et al 20 to replace the metal components of the alumina, allowing the transducers to produce excessive torque and output energy of the rod-shaped piezoelectric rotary motors. Density functional theory was employed in Neto et al 21 to simulate the molecular electronics behavior of the nitrogenous bases of human DNA under electric area effects.…”

Section: Piezoelectric Materials In Nanostructuresmentioning

confidence: 99%

Smart materials for changing the electrical properties of nanostructures

Abbas

2021

Composites and Advanced Materials

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Smart materials have an important role in modern applications. They have contributed to improving various applications in several fields. One of the areas most affected by the improvement of smart materials is nanostructures. These materials are created by basic techniques, such as arrangement manipulation. Significant efforts have been made to enhance smart materials so that they resemble natural materials in terms of accuracy, design, and utility. Here, a review of the latest research on smart materials that can alter the electrical properties of nanostructures is presented. The main objective of this review is to introduce the role of smart materials in controlling the electrical performance of nanostructures. Furthermore, this review proposes an analysis of the integration and cooperation of previous research, such as the use of a piezoelectric motor in the design of structural magnetic nanodevices to control these devices. Piezoelectric actuators can also be used to develop a new method for controlling PV modulators for fabricating a single-wall nanotube. This new proposal could alter the properties of many nanoscale systems serving several medical and engineering fields. Moreover, this review proposes a novel methodology for nanocoating by introducing an antireflective coating with multiple layers. This method can effectively enhance the functions of the nanoscale coating.

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“…(1) For the B 2 -2 and T 2 motors, the PZT elements respectively work in the transverse (d31) and shear (d15) modes [7]. Consequently, the B 2 -2 motor's keff (8.4%) is 0.27 times that of the T 2 motor (30.4%); this limits the thrust force density and power density of the B 2 -2 motor [17].…”

Section: B Performance Comparisonmentioning

confidence: 99%

“…It is known that vibration modes have fundamental effect on thrust force density and power density [16,17]. To date, linear motors mainly operate in bending/bending (B 2 ), longitudinal/longitudinal (L 2 ), and bending/longitudinal (B/L) modes [6][7][8][9][10][11][12][13][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

A Traveling-Wave Linear Ultrasonic Motor Driven by Two Torsional Vibrations: Design, Fabrication, and Performance Evaluation

Niu

Cao

et al. 2020

IEEE Access

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In this study, we design and fabricate a tank-track-shaped stator working in two torsional modes to form a traveling-wave (TW) linear ultrasonic motor (USM). The stator comprises two torsional transducers and two kidney-shaped vibrating bodies. When voltages with a certain phase are applied to the transducers, two in-phase TWs are excited on the vibrating bodies to frictionally drive the slider. Here, the torsional vibration guarantees strong electromechanical coupling, and meanwhile, the tank-track shape ensures plural driving points and low weight; these features may facilitate realizing high thrust force density and high power density of linear motors. To examine the feasibility, first, we constructed a stator prototype 116 mm in length, 91 mm in width, and 32 mm in thickness and explored its vibration properties. The minimal standing wave (SW) ratio reaches 1.21 and the small SW components are desirable for TW motors. Then, we measured the load characteristics and found that, at the working frequency of 54.34 kHz and the phase shift of −110°, the maximal thrust force and maximal output power were 96.1 N and 27.8 W, respectively. Moreover, the thrust force density and power density reached respectively 234.1 N/kg and 67.8 W/kg, relatively high compared to the values of most conventional linear motors. This study verifies the feasibility of our proposal and paves a new way of designing powerful linear USMs. INDEX TERMS Linear ultrasonic motor, torsional vibration, traveling wave, thrust force density, power density.

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Piezoelectric Motor Utilizing an Alumina/PZT Transducer

Cited by 39 publications

References 47 publications

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Smart materials for changing the electrical properties of nanostructures

A Traveling-Wave Linear Ultrasonic Motor Driven by Two Torsional Vibrations: Design, Fabrication, and Performance Evaluation

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