Fabrication and Characterization of a Microscale Piezoelectric Vibrator Based on Electrohydrodynamic Jet Printed PZT Thick Film

Abstract

This paper proposes a novel way of preparing a PZT thick film micro vibrator using the electrohydrodynamic jet (E-Jet) printing technique. Initially, a micro piezoelectric vibrator was simulated and designed for obtaining optimized structure, which has a total thickness of less than 600 µm. Subsequently, the PZT thick film element was directly printed on the elastic body using the E-Jet printing. This method avoids the glue fabrication process involved in the bulk piezoelectric fabrication, thus avoiding the limits of voltage drops, isolating and absorbing amplitude usually occurred in the vibrator having glue interface. It was observed that B02 and B03 modes were generated at frequencies of 29.74 and 79.14 kHz, respectively, and the amplitudes of B02 and B03 modes were 406 and 176 nm, respectively. The error between the simulation and test result in the B03 modal is only 0.35%, which indicates the accuracy of the simulation analysis and the fabrication process. The PZT thick film traveling-wave micro vibrator successfully realized bidirectional rotation of a rotor, with a maximum speed of 681 rpm, which also shows a linear relationship between excitation voltage and rotary speed. This paper provides an effective method for preparing a micro piezoelectric vibrator for MEMS ultrasonic devices, which simplifies the manufacturing process and enhances the performance of the piezoelectric vibrator.

4D Printing: Technological and Manufacturing Renaissance

“…[156][157][158] Printed structure changes their shape when they absorb water and recover their original shape after drying. [159][160][161] Furthermore, this shape change behavior also stimulates the low Tg, and consequently, the shape recovery process takes place. In the same context, Ren et al [162] proposed a 4DP technique under both water and temperature stimuli-responsive shape-shifting behavior of PUbased elastomer material.…”

“…[ 156–158 ] Printed structure changes their shape when they absorb water and recover their original shape after drying. [ 159–161 ] Furthermore, this shape change behavior also stimulates the low Tg, and consequently, the shape recovery process takes place. In the same context, Ren et al.…”

A Wearable Bidirectional Human–Machine Interface: Merging Motion Capture and Vibrotactile Feedback in a Wireless Bracelet

“…Each of the motors, placed on the forearm, was intended to represent pressure on a specific fingertip. Pressure can also be generated through piezoelectric thick-film vibrators [13], where a change in length is induced perpendicular to the skin. These actuators are based on the inverse piezoelectric effect, in which a change in the length of the piezoelectric crystal can be induced by applying voltage [13].…”

Editorial for the Special Issue on 3D Printed Actuators

“…The research findings reported in the 3D-Printed Actuators Special Issue show promising approaches for engineering biology-like actuation. These findings have led to the following: the creation of an anatomically correct robotic hand with human-like grasping capabilities [ 1 ]; emulation of an antagonistic variable stiffness actuation observed in the musculoskeletal system of snakes [ 2 ]; reducing friction in rotating parts and joints by combining 3D printing and radiation pressure [ 3 ]; fabrication of flexible piezoelectric composite actuators without application of any adhesives [ 4 ]; extension of the service life of actuators through geometric and material optimization [ 5 ]; and acceleration of print inspection through an open-source low-power computer-vision hardware [ 6 ].…”

“…The typical fabrication involves complex manufacturing processes such as photolithography, etching, sol-gel, and sputtering. Using a cost-effective electrohydrodynamic (E-Jet) printing, Wang et al applied PZT film directly to elastic structures, followed by co-firing sintering to form PZT actuators [ 4 ]. Their method eliminated the use of adhesives—thus overcoming the limits of voltage drops, and absorbing amplitude in current PZT actuators.…”