Piezoelectric micro-transformer based on PZT unimorph membrane

Abstract

In this paper, a piezoelectric micro-transformer processed in a SOI (silicon-on-insulator) wafer is presented. The micro-transformer consists of a unimorph circular membrane (PZT/silicon). The manufacturing uses an original method consisting of a deposition by sputtering and a etching by lift-off of thin material layers. This transformer is intended to supply micro-systems requiring a very low amount of energy. An analytical model has enabled us to determine the electrical equivalent circuit of the transformer, to express the resonance frequencies and to plot the deflection and strain shapes of the membrane. A mechanical characterization has been carried out by interferometry and an electric characterization has been conducted using a first prototype.

A novel piezoelectric microtransformer for autonomous sensors applications

“…In a previous work [1][2][3] we made a first generation of micro transformers, which take advantage of the direct and reverse piezoelectric effect and a mechanical amplification, taking place between the center and the boundary of a vibrating electromechanical structure ( Fig. 2).…”

Analysis of a multi-axial quantum-informed ferroelectric continuum model: Part 2—sensitivity analysis

“…FeRAM) (Scott, 2000). Additional discussion of applications can be found in the works by Cattafesta and Sheplak (2011), Chopra and Sirohi (2014), Jaffe et al (1971), Leo (2007), Nuffer and Bein (2006), Smith and Hu (2012), Smith (2005), Uchino (2010), Uchino and Giniewicz (2003), and Vasic et al (2004).…”

Energy recovery power supply for piezoelectric actuator

“…Thus, there are critical limitations on the actuator and it's driving electronics. To produce a mechanical actuation, piezoelectric element requires a high electric field, so the high voltages ranging from ten to several hundred volts are usually required [5][6][7][8][9][10]. Different piezoelectric actuators were available: thick PZT (Ferroperm Piezoceramics), PZT fibers composite (Smart Material) and Thunder® (Face International).…”