Piezoelectric Detection and Response Characteristics of Barium Titanate Unimorph Cantilevers Under AC Electric Fields

Abstract

This paper studies the detection and response characteristics of barium titanate (BT) unimorph cantilevers under alternating current (AC) electric fields both numerically and experimentally. The unimorph cantilever consists of the BT layer and Cu shim, and the BT layer has sensing, grounding and driving electrodes. The deflection and output voltage of the cantilevers were predicted by three dimensional finite element analysis (FEA). The deflection and output voltage were also measured, and a comparison was made between prediction and experiment. The deflection, stress, output voltage and output power were then discussed.

Evaluation of dielectric and piezoelectric behavior of unpoled and poled barium titanate polycrystals with oxygen vacancies using phase field method

“…However, due to lead toxicity, the introduction of legislation in Europe to limit the usage of lead in electronic products has led to a worldwide search for lead-free compounds [3]. BaTiO 3 ceramics is one of the widely applied lead-free ferroelectric materials due to high permittivity and low cost [4,5]. Recently, Zheng et al [6] studied experimentally the effect of grain size on the permittivity and piezoelectric constant of the poled BaTiO 3 ceramics.…”

A Review of Piezoelectric and Magnetostrictive Biosensor Materials for Detection of COVID‐19 and Other Viruses

“…The mass change Δm on the electrode surface leads to a time-dependent frequency shift (see Figure 5b) that is represented by the frequency change Δf (Figure 5c) of the material in the oscillation circuit. [41] Mainly anisotropic materials such as aluminum nitride (AlN), [42][43][44] zinc oxide (ZnO), [45,46] barium titanate (BaTiO 3 ), [47][48][49] lead titanate (PbTiO 3 ), [50][51][52] quartz (SiO 2 ), [53,54] and poly(vinylidene fluoride) (PVDF) [55,56] are used as sensor materials. [57] Table 2 lists the Young's modulus E, shear modulus μ, Poisson's ratio ν, mass density ρ, longitudinal piezoelectric coefficient d 33 , and transverse piezoelectric coefficient d 31 of each of these materials.…”

“…AlN 308.3 [42] 130.8 [42] 0.179 [42] 3.26 [43] 6.72 [44] −2.71 [44] ZnO 112.2 [45] 42.2 [45] 0.336 [45] 5.53 [45] 12.3 [46] −5.12 [46] BaTiO 3 112 [47] 43 [48] 0.35 [49] 5.4 [47] 140 [47] −60 [47] PbTiO 3 213.7 [50] 84.3 [50] 0.26 [50] 7.52 [51] 79.1 [52] −23.1 [52] SiO 2 72.52 [53] 30.97 [53] 0.166 [53] 2.204 [53] d 11 = 2.3 [54] d 14 = −0.67 [54] PVDF 2 [55] 0.752 [55] 0.33 [55] 1.8 [55] −22 [56] 23 [55] w, and thickness h. The mass change of the beam in bending mode due to adsorption of virus particles is obtained by Figure 7a shows an example of the fabrication process method for a microelectromechanical mass-sensor based on the cantilever beam, actuated using a piezoelectric ZnO thin film. [62] The beam stack consists of Si/SiO 2 /Pt/ZnO/ Pt layers.…”

“…For the piezoelectric sensors, both driving and sensing electrodes are needed. [ 47 ] The benefit of this detection method is that it does not require fast Fourier transform (FFT) or discrete Fourier transform (DFT) analysis and will shorten the detection time. In order to increase the sensitivity (e.g., output voltage change with respect to the mass change), it is necessary to investigate and identify the optimum materials and structures and vibration mode by numerical simulation. As mentioned earlier, the sensitivity varies depending on the distribution [ 109 ] and location [ 105 ] of the virus mass.…”

Recent Advances in Quartz Crystal Microbalance Biosensors Based on the Molecular Imprinting Technique for Disease-Related Biomarkers

“…Piezoelectric materials include ceramics, crystals, polymers such as polyvinylidene fluoride, and piezoelectric composites [60]. Anisotropic materials such as poly(vinylidene fluoride) (PVDF) [61,62], zinc oxide (ZnO) [63], aluminum nitride (AlN) [64,65], barium titanate (BaTiO 3 ) [66], quartz (SiO 2 ) [67,68], and lead titanate (PbTiO 3 ) [69,70] are mainly utilized as biosensor materials [71]. The piezoelectric biosensor vehicle, based on a labelfree technique, has achieved a big advance [72] and has been successfully carried out in applications of biomolecule detection.…”