Piezoelectric accelerometer for high temperature (1300°C) sensing

Salazar, Giovanni; Kim, Kyungrim; Zhang, Shujun; Jiang, Xiaoning

doi:10.1117/12.917104

Cited by 3 publications

(4 citation statements)

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Section: Figurementioning

confidence: 99%

“…More recently, further studies of piezoelectric accelerometers using YCOB crystals for higher temperatures (≈1,300 °C) have been conducted by Salazar et al [ 59 ]. A similar design including the shear mode type and electrode-less structure was used for the prototyped accelerometer.…”

Section: Ht Piezoelectric (Htpe) Sensingmentioning

confidence: 99%

“… ( a ) The sensor sensitivity at increasing temperatures (25–1,250 °C) for different frequencies (100–300 Hz). ( b ) The measured average sensitivity during a 10-hour dwelling test at 1,250 °C [ 59 ] (copyright 2012 by the SPIE). …”

Section: Figurementioning

confidence: 99%

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High-Temperature Piezoelectric Sensing

Jiang

Kim

Zhang

et al. 2013

Sensors

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326

166

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Piezoelectric sensing is of increasing interest for high-temperature applications in aerospace, automotive, power plants and material processing due to its low cost, compact sensor size and simple signal conditioning, in comparison with other high-temperature sensing techniques. This paper presented an overview of high-temperature piezoelectric sensing techniques. Firstly, different types of high-temperature piezoelectric single crystals, electrode materials, and their pros and cons are discussed. Secondly, recent work on high-temperature piezoelectric sensors including accelerometer, surface acoustic wave sensor, ultrasound transducer, acoustic emission sensor, gas sensor, and pressure sensor for temperatures up to 1,250 °C were reviewed. Finally, discussions of existing challenges and future work for high-temperature piezoelectric sensing are presented.

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Section: Figurementioning

confidence: 99%

Section: Ht Piezoelectric (Htpe) Sensingmentioning

confidence: 99%

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High-Temperature Piezoelectric Sensing

Jiang

Kim

Zhang

et al. 2013

Sensors

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326

166

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“…by utilizing micro-heaters [8]. Piezoelectric sensors are less sensitive to temperature and have been demonstrated for operation at up to 1250 • C [9], but they show a band-pass response that limits their sensitivity at low frequencies [10].…”

Section: Introductionmentioning

confidence: 99%

Capacitive inertial sensing at high temperatures of up to 400 °C

Asiatici

Fischer

Rödjegård

et al. 2016

Sensors and Actuators A: Physical

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PostprintThis is the accepted version of a paper published in Sensors and Actuators A-Physical. This paper has been peer-reviewed but does not include the final publisher proof-corrections or journal pagination. Citation for the original published paper (version of record):Asiatici, M., Fischer, A C., Rodjegard, H., Haasl, S., Stemme, G. et al. (2016) Capacitive inertial sensing at high temperatures of up to 400 degrees C Sensors and Actuators A-Physical, 238: 361-368Abstract High-temperature-resistant inertial sensors are increasingly requested in a variety of fields such as aerospace, automotive and energy. Capacitive detection is especially suitable for sensing at high temperatures due to its low intrinsic temperature dependence. In this paper, we present high-temperature measurements utilizing a capacitive accelerometer, thereby proving the feasibility of capacitive detection at temperatures of up to 400 • C. We describe the observed characteristics as the temperature is increased and propose an explanation of the physical mechanisms causing the temperature dependence of the sensor, which mainly involve the temperature dependence of the Young's modulus and of the viscosity and the pressure of the gas inside the sensor cavity. Therefore a static electromechanical model and a dynamic model that takes into account squeeze film damping were developed.

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Electrical properties of yttrium calcium oxyborate crystal annealed at high temperature and low oxygen partial pressure

Tian

Chen

et al. 2019

Journal of Materiomics

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Piezoelectric accelerometer for high temperature (1300°C) sensing

Cited by 3 publications

References 0 publications

High-Temperature Piezoelectric Sensing

High-Temperature Piezoelectric Sensing

Capacitive inertial sensing at high temperatures of up to 400 °C

Electrical properties of yttrium calcium oxyborate crystal annealed at high temperature and low oxygen partial pressure

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