Piezo-actuated nanodiamond cantilever technology for high-speed applications

Kusterer, J.; Lüker, A.; Herfurth, Patrick; Men, Yakiv; Ebert, Wolfgang; Kirby, Paul B.; O'Keefe, M.F.; Kohn, E.

doi:10.1016/j.diamond.2008.01.119

Cited by 9 publications

(7 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Previously, NV centers have been prepared on various semiconductor and insulating substrates in the form of cantilevers 16 – 18 , microcavities 19 , ceramic perovskite 20 , and polymer membranes 21 . Such HNQ devices fabricated on diamond and silicon surfaces have the advantages of being lightweight, and highly responsive to the changes in the local environment.…”

Section: Introductionmentioning

confidence: 99%

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Dadhich

Panda

Sidhu

et al. 2023

Sci Rep

View full text Add to dashboard Cite

The quantum properties of fluorescent nanodiamonds offer great promise for fabricating quantum-enabled devices for physical applications. However, the nanodiamonds need to be suitably combined with a substrate to exploit their properties. Here, we show that ultrathin and flexible glass (thickness 30 microns) can be functionalized by nanodiamonds and nano-shaped using intense femtosecond pulses to design cantilever-based nanomechanical hybrid quantum sensors. Thus fabricated ultrathin glass cantilevers show stable optical, electronic, and magnetic properties of nitrogen-vacancy centers, including well-defined fluorescence with zero-phonon lines and optically detected magnetic resonance (ODMR) near 2.87 GHz. We demonstrate several sensing applications of the fluorescent ultrathin glass cantilever by measuring acoustic pulses, external magnetic field using Zeeman splitting of the NV centers, or CW laser-induced heating by measuring thermal shifting of ODMR lines. This work demonstrates the suitability of the femtosecond-processed fluorescent ultrathin glass as a new versatile substrate for multifunctional quantum devices.

show abstract

Section: Introductionmentioning

confidence: 99%

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Dadhich

Panda

Sidhu

et al. 2023

Sci Rep

View full text Add to dashboard Cite

show abstract

“…Sub-micron diamonds allow the outstanding material characteristics of diamond relating to its electrical, thermal, chemical, and mechanical properties to be applied on microscopic scales. Some pertinent examples of this include transistors with excellent heat spreading, − chemically inert particles for drug delivery, − and mechanically stable micro-electro-mechanical system structures for nanoscale sensing applications. , However, as diamond gets smaller, the surface area increases, and so does the volume of any non-diamond surface content, hydrogen terminations, and disordered, sp 2 , and non-diamond carbons in the well-known core–shell model. − Non-diamond functional group terminations are preferred for conjugating certain types of proteins, however, reconstructed sp 2 carbon terminations are considered a hindrance as this causes particle agglomeration; ,, hence, there has been much research into rigorous purification methods. − Hence, characterization of non-diamond impurities on nano-diamond is a prominent research area for assessing its quality in various applications.…”

Section: Introductionmentioning

confidence: 99%

Microwave Permittivity of Trace sp² Carbon Impurities in Sub-Micron Diamond Powders

Cuenca¹,

Thomas²,

Mandal³

et al. 2018

ACS Omega

View full text Add to dashboard Cite

Microwave dielectric loss tangent measurements are demonstrated as a method for quantifying trace sp 2 -hybridized carbon impurities in sub-micron diamond powders. Appropriate test samples are prepared by vacuum annealing at temperatures from 600 to 1200 °C to vary the sp 2 /sp 3 carbon ratio through partial surface graphitization. Microwave permittivity measurements are compared with those obtained using X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and electron energy loss spectroscopy (EELS). The average particle size remains constant (verified by scanning electron microscopy) to decouple any geometric dielectric effects from the microwave measurements. After annealing, a small increase in sp 2 carbon was identified from the XPS C 1s and Auger spectra, the EELS σ* peak in the C 1s spectra, and the D and G bands in Raman spectroscopy, although a quantifiable diamond to G-band peak ratio was unobtainable. Surface hydrogenation was also evidenced in the Raman and XPS O 1s data. Microwave cavity perturbation measurements show that the dielectric loss tangent increases with increasing sp 2 bonding, with the most pertinent finding being that these values correlate with other measurements and that trace concentrations of sp 2 carbon as small as 5% can be detected.

show abstract

“…It possesses the highest acoustic velocity among all the materials, very high thermal conductivity, exceptional wear resistance, and chemical inertness. 1 The electrical conductivity of diamond can be tailored from intrinsic insulator to conductor through doping. The M/NEMS actuators/resonators manufactured from diamond can overcome the drawbacks of silicon, which has relatively poor physical, chemical, and mechanical properties.…”

Section: Introductionmentioning

confidence: 99%

Piezoelectric Pb(Zr0.52Ti0.48)O3 thin films on single crystal diamond: Structural, electrical, dielectric, and field-effect-transistor properties

Liao

Gotoh

Tsuji

et al. 2010

Journal of Applied Physics

View full text Add to dashboard Cite

The combination of piezoelectric materials and single crystal diamond offers the opportunity for the development of multifunctional micromachined devices under extreme conditions. In this work, the authors report the structural, electrical, optical, and dielectric properties of Pb͑Zr 0.52 ,Ti 0.48 ͒O 3 ͑PZT͒ thin films integrated on single crystal diamond ͑100͒ substrates. The corresponding field effect transistor based on the metal-piezoelectric-insulator-semiconductor ͑MPIS͒ structure was fabricated on a homoepitaxial p-type diamond layer grown on a type-Ib diamond substrate. Different intermediate layers were deposited on single diamond substrates prior to the PZT films growth in order to achieve the best polarization properties. It was observed that the utilization of an Al 2 O 3 buffer layer followed by a SrTiO 3 seed layer favored the formation of a single perovskite PZT phase. Transmission electron diffraction patterns revealed that the PZT films included an initial layer at the SrTiO 3 / PZT interface followed by a well crystallized layer. The PZT film grown on SrTiO 3 / Al 2 O 3 / diamond exhibited much better in-plane polarization than that of the PZT film on Al 2 O 3 / diamond. The photoresponse behavior revealed that carriers trapping effect was trivial in the PZT film. The channel electrical conductivity of the MPIS field effect transistor was successfully modulated by the gate bias.

show abstract

Piezo-actuated nanodiamond cantilever technology for high-speed applications

Cited by 9 publications

References 10 publications

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Microwave Permittivity of Trace sp² Carbon Impurities in Sub-Micron Diamond Powders

Piezoelectric Pb(Zr0.52Ti0.48)O3 thin films on single crystal diamond: Structural, electrical, dielectric, and field-effect-transistor properties

Contact Info

Product

Resources

About

Piezo-actuated nanodiamond cantilever technology for high-speed applications

Cited by 9 publications

References 10 publications

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Nanodiamonds enable femtosecond-processed ultrathin glass as a hybrid quantum sensor

Microwave Permittivity of Trace sp2 Carbon Impurities in Sub-Micron Diamond Powders

Piezoelectric Pb(Zr0.52Ti0.48)O3 thin films on single crystal diamond: Structural, electrical, dielectric, and field-effect-transistor properties

Contact Info

Product

Resources

About

Microwave Permittivity of Trace sp² Carbon Impurities in Sub-Micron Diamond Powders