2010
DOI: 10.1016/j.microrel.2010.01.007
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Physically based models of electromigration: From Black’s equation to modern TCAD models

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Cited by 118 publications
(43 citation statements)
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References 96 publications
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“…(10) (without the thermal and stress terms) as detailed by R.L. de Orio and his colleagues [25] was compared with the simulation results. The boundary conditions are shown in Eq.…”
Section: Model Validationmentioning
confidence: 99%
“…(10) (without the thermal and stress terms) as detailed by R.L. de Orio and his colleagues [25] was compared with the simulation results. The boundary conditions are shown in Eq.…”
Section: Model Validationmentioning
confidence: 99%
“…It is this effect which is referred to as electromigration (EM) [1,2] in the literature. The migration is almost entirely due to a vacancy exchange mechanism [3] and the material flux can be described in terms of a vacancy flux J v [4].…”
Section: Introductionmentioning
confidence: 99%
“…Depletion results ultimately in the formation of voids and line failure. Modelling EM has therefore a long tradition and has reached a high level of maturity [4]. The focus has naturally been on how to avoid or delay deterioration of interconnects, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…These models are essentially parametric modifications of Black's Equation. Orio et al [5] study the well-known EM failure models to identify gaps in models and implementation. Shatzkes et al [15] empirically demonstrate that the current density exponent in Black's Equation should be n = 2.…”
Section: Introductionmentioning
confidence: 99%