2014
DOI: 10.1016/j.apsusc.2014.01.010
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Physical deposition of carbon doped titanium nitride film by DC magnetron sputtering for metallic implant coating use

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Cited by 50 publications
(25 citation statements)
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“…A stretching vibration of Ti-O bond appears at 660 cm −1 and proves the formation of TiO 2 [51]. No sharp absorption peak corresponding to stretching vibrations of Ti-N is observed due to its high reflectivity of infrared light [52]. are consistent with the reported data [48,49].…”
Section: Materials Characterizations and Analysissupporting
confidence: 91%
“…A stretching vibration of Ti-O bond appears at 660 cm −1 and proves the formation of TiO 2 [51]. No sharp absorption peak corresponding to stretching vibrations of Ti-N is observed due to its high reflectivity of infrared light [52]. are consistent with the reported data [48,49].…”
Section: Materials Characterizations and Analysissupporting
confidence: 91%
“…Fourier‐transform infrared (FTIR) spectra of the pristine and the cleaned surfaces ( Figure ) show the characteristics bands of TiN film deposited through sputtering, as recently observed elsewhere . However, in comparison with the pristine one, a new broad absorption band between 3000 and 3500 cm –1 appears in the FTIR spectrum of the cleaned sample.…”
Section: Resultssupporting
confidence: 69%
“…This type of ceramic can be employed as diffusion barrier in microelectronics, protective coatings for biomedical devices, hard and decorative coatings of mechanical tools or for manufacturing micro-gap discharge devices. The properties that make titanium nitride suitable for applications such as mentioned above are its high hardness, good adhesive wear and resistance to corrosion, high melting temperature, thermal and chemical stability, biocompatibility and so forth [6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%