2004
DOI: 10.1016/j.vacuum.2003.12.079
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Physical–chemical hybrid deposition of DLC film on rubber by T-shape filtered-arc-deposition

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Cited by 46 publications
(28 citation statements)
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“…Generally, the coatings prepared with C 2 H 2 look smoother than those without C 2 H 2 . This is in good agreement with the results in [7].…”
Section: Microscopic Analysissupporting
confidence: 93%
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“…Generally, the coatings prepared with C 2 H 2 look smoother than those without C 2 H 2 . This is in good agreement with the results in [7].…”
Section: Microscopic Analysissupporting
confidence: 93%
“…As reported in [7], the application of C 2 H 2 accelerates the deposition rate, which leads to a higher thickness than the set value.…”
Section: Thickness Of the Coatingsmentioning
confidence: 68%
See 1 more Smart Citation
“…The structure of the hydrogenated film on rubber, however, is very different from the structure of ta-C films on silicon wafers. The former appears as ''meshed islands,'' with the islands cracking into smaller pieces as the substrate was bent [87].…”
Section: Hydrogen Nitrogen and Metal-doped Tetrahedral Amorphous Camentioning
confidence: 99%
“…Additionally, the W-C film was employed as the interlayer of the DLC film, and adhesion of the DLC film to the Si substrate was investigated. The W-C films and DLC films were deposited by using a filtered pulse arc deposition (FPAD) system 12, 13, 14 and a T-shaped filtered arc deposition (T-FAD) system 15,16 , respectively. The FPAD method and T-FAD method are two variants of filtered arc deposition (FAD) methods 17,18 .…”
Section: Introductionmentioning
confidence: 99%