Physical and chemical characterization of barium strontium titanate thin films

Remmel, T.; Chen, Wei; Liu, Ran; Kottke, M.; Gregory, R. B.; Fejes, Peter; Baumert, B. A.; Chu, Peir

doi:10.1063/1.56807

Cited by 5 publications

(5 citation statements)

References 5 publications

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“…This interesting fact noted for the three most prominent XRD peaks indicates some differences in microstructure between the bottom and the top of the thin films treated with the MW field. Expansion of the FWHM width is typically indicative of a decrease in the grain size in the BST film [20]. This discrepancy could be due to the fact that the bottom of the film is in closer proximity to the susceptor and, hence, the effects associated with the crystallization due to the susceptor heating compete in a more prominent way with the effects associated with the MW field heating of the film that include inhibited grain growth.…”

Section: Discussion Of the Obtained Resultsmentioning

confidence: 99%

The Effects of Microwave Postgrowth Processing of BaSrTiO3 Thin Films on Their Dielectric Properties

et al. 2019

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Tunable complex oxide thin films have generated a lot of interest in recent years due to their potential to become a core technology in the new generation of multiple communications devices. These films are grown via different deposition methods and frequently postprocessed in order to enhance their dielectric properties. This paper discusses an alternative postprocessing technique where complex oxide thin films grown by radio frequency (RF) magnetron sputtering have been treated with an external microwave field instead of a conventional furnace. The treated films and untreated reference film were characterized for their microstructure and dielectric properties. The obtained results indicate a significant reduction in dielectric losses and leakage current in the microwave processed films as opposed to the untreated reference. The results are discussed together with potential additional benefits of the proposed approach.

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Section: Discussion Of the Obtained Resultsmentioning

confidence: 99%

The Effects of Microwave Postgrowth Processing of BaSrTiO3 Thin Films on Their Dielectric Properties

et al. 2019

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“…Sifat piezoelectric dan piroelectric memungkinkan BST digunakan untuk aplikasi sensor [5], sedangkan sifat elektro-optiknya dapat diterapkan pada switch termal infra merah [1,6]. Kelebihan-kelebihan tersebut menyebabkan BST menjadi pusat penelitian untuk dikembangkan menjadi divais generasi baru [6,7,9].…”

Section: Latar Belakangunclassified

Teknologi Proses Produksi Sensor Cahaya Untuk Pengembangan Robotik Berbasis Teknologi Lapisan Tipis Bahan Ferroelektrik Barium Stronsium Titanat (Ba0,55sr0,45tio3)

Faanzir

Umar

2013

jme

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Lapisan film tipis ferroelectric telah digunakan untuk aplikasi dalam medan elektronik dan listrikoptik. Barium Strontium Titanate (BST) adalah material ferroelectric yang sangat atraktif dan menjadi pusat perhatian berkaitan dengan beberapa keuntungan diantaranya: rugi-rugi optik yang rendah, konstanta dielektrik rendah, dan kapasitas penyimpanan muatan yang tinggi. Tujuan dari penelitian ini adalah untuk mendapatkan sifat-sifat optik dan susunan kristal dari thin-film Ba0,55 Sr0.45Tio3 (BST)1 M. Annealing time 15 jam pada temperatur 750°C dan 775oC pada substrat silicon tipe-p dengan menggunakan metode Chemical Solution Decomposition (CSD) yang diikuti oleh proses spin coating pada 3000 rpm selama 30 detik. Pengujian sifat-sifat optik termasuk analisis transmitansi dan absorbansi, menunjukkan bahwa peningkatan suhu annealing dapat memperbaiki sifat absorbansi dan celah energi dari BST. Celah energi yang diperoleh dengan menggunakan plot tauc adalah 3.05 eV untuk temperatur annealing 750° C dan 3,225 eV untuk temperatur annealing 775o C. Susunan kristal dengan difraksi X-Ray (XRD) menunjukkan bahwa perbedaan temperatur annealing menyebabkan pergeseran sudut difraksi. Struktur pseudo tetragonal dari Ba0, 55Sr0.45Tio3 menjadi tetragonal (c / a <1) dan struktur kristal memiliki distribusi orientasi kristal.

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“…The Ba-rich (Ba 1-x Sr x )TiO 3 ceramics have perovskite tetragonal structure. [Remmel et al, 1999] Sr-rich (Ba 1-x Sr x )TiO 3 ceramics have perovskite cubic structure. [Izumskaya et al, 2010] The lattice constant of BST versus composition had reported by Baumert et al [Baumert et al, 1997] who showed the cubic phase was found when the ST content is higher than 24% which is lower than that of Keller.…”

Section: Compositionmentioning

confidence: 99%

Evaluation on Structure Modification and Properties of (Ba1-xSrx)(Ti1-y Zry)O3 Ceramics by using Rietveld Method

Huang¹,

Chiu²,

Wu³

et al. 2011

Advances in Ceramics - Electric and Magnetic Ceramics, Bioceramics, Ceramics and Environment

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Physical and chemical characterization of barium strontium titanate thin films

Cited by 5 publications

References 5 publications

The Effects of Microwave Postgrowth Processing of BaSrTiO3 Thin Films on Their Dielectric Properties

The Effects of Microwave Postgrowth Processing of BaSrTiO3 Thin Films on Their Dielectric Properties

Teknologi Proses Produksi Sensor Cahaya Untuk Pengembangan Robotik Berbasis Teknologi Lapisan Tipis Bahan Ferroelektrik Barium Stronsium Titanat (Ba0,55sr0,45tio3)

Evaluation on Structure Modification and Properties of (Ba1-xSrx)(Ti1-y Zry)O3 Ceramics by using Rietveld Method

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