Abstract:Stabilization after the lithography process is crucial in order to prevent deformation of photoresist patterns by other thermal processes used in semiconductor production. UV hardening is capable of minimizing negative effects of thermal processes such as rounded shaped lines; line width widening or shrinkage and CD shift. The amount of UV energy absorbed and final process temperature are important process parameters; which effect directly the degree of cross-linking. So, this paper examines optimization of pr… Show more
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