2018
DOI: 10.1063/1.5038144
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Photoresponsive behavior of electron-beam irradiated MoS2 films

Abstract: We herein aim to improve the understanding of the photoresponsive behavior of electron-beam irradiated MoS2 films. In this context, MoS2-based photodetectors were fabricated via sputtering and electron beam irradiation (EBI). The structural transformation imparted on MoS2 through EBI and the relationship between the structural, stoichiometric, and photoelectric properties of the synthesized MoS2 were investigated. MoS2 channels displayed a remarkable photoresponse in the visible light region. More specifically… Show more

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Cited by 9 publications
(7 citation statements)
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“…Figure a also shows that, after irradiation, the transfer characteristic slowly recovers approaching the initial state in a time of the order of hours. The electron beam generates electron–hole pairs in both the channel layer and the underlying dielectric and promotes the formation of defects . This favors charge trapping and degrades the PdSe 2 electrical conductivity.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…Figure a also shows that, after irradiation, the transfer characteristic slowly recovers approaching the initial state in a time of the order of hours. The electron beam generates electron–hole pairs in both the channel layer and the underlying dielectric and promotes the formation of defects . This favors charge trapping and degrades the PdSe 2 electrical conductivity.…”
Section: Resultsmentioning
confidence: 99%
“…The electron beam generates electron-hole pairs in both the channel layer and the underlying dielectric and promotes the formation of defects. [43,47,[70][71][72] This favors charge trapping and degrades the PdSe2 electrical conductivity. The 10 keV electrons are absorbed mostly in the SiO2 layer, where they create a pile-up of negative charge, which screens the gate field and affects the channel carrier conductivity.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, there are two types of methods to introduce defects in MoS 2 flakes, which are divided into the top-down and bottom-up routes. The top-down method needs the assistance of electron beam irradiation, plasma exposure, , heating treatment in a special atmosphere, etc., while the bottom-up method introduces defects during the CVD growth process . For example, sulfur treatment was used to passivate sulfur vacancies in monolayer MoS 2 to improve the electrical performances .…”
Section: Introductionmentioning
confidence: 99%
“…26 However, the EBI-treated MoS 2 also shows extremely low photoresponsivity due to the insufficient crystallinity and sulfur vacancies. 27 In this study, we present MoS 2 phototransistor arrays constructed on large-dimensional MoS 2 films grown using a radio-frequency (RF) magnetron sputtering deposition method combined with post-treatments processes. High-quality centimeter-scale trilayer MoS 2 was achieved by sputtering, EBI, and sulfurization.…”
Section: Introductionmentioning
confidence: 99%
“…Electron beam irradiation (EBI) is used to induce atomic rearrangement through inelastic scattering, resulting in the crystallization of MoS 2 . However, the EBI-treated MoS 2 also shows extremely low photoresponsivity due to the insufficient crystallinity and sulfur vacancies …”
Section: Introductionmentioning
confidence: 99%