Photoreaction of Titanium‐Based Metal‐organic Compounds for Ceramic Fine Patterning

Kikuta, Koichi; Takagi, Katsuhiko; Hirano, Shin‐ichi

doi:10.1111/j.1151-2916.1999.tb01957.x

Cited by 17 publications

(4 citation statements)

References 15 publications

(18 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Micrometer-scale titania and tin oxide patterns have been made by using photosensitive modified metal alkoxides. 190,191 Micropatterned ZnO nanoarrays have been made by first preparing a UV-patterned seed layer, followed by selective growth of ZnO nanorods. 192 Recently, Pham et al developed a methacrylated polyvinylsilazane polymer photoresist that transforms into a preceramic pattern upon UV exposure.…”

Section: Photolithography-aided Patterningmentioning

confidence: 99%

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

Elshof

Khan

Göbel

2010

Journal of the European Ceramic Society

View full text Add to dashboard Cite

Section: Photolithography-aided Patterningmentioning

confidence: 99%

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

Elshof

Khan

Göbel

2010

Journal of the European Ceramic Society

View full text Add to dashboard Cite

“…Besides the methods for patterning of ceramics discussed in this paper, a number of nonconventional methods have been developed to pattern a series of materials. Some of them are microtransfer molding (μTM), micromolding in capillaries (MIMIC), embossing, and casting, which can pattern materials using liquid precursors such as sol−gels or colloidal suspensions on a submicrometer scale. Patterns of ceramics were also achieved by focused ion beam patterning, electron beam direct writing, nanoimprint lithography, next generation lithography, and self-patterning via either physical 206 or chemical routes …”

Section: Summary and Perspectivesmentioning

confidence: 99%

Bioinspired Ceramic Thin Film Processing: Present Status and Future Perspectives

Gao

Koumoto

2005

Crystal Growth & Design

153

106

View full text Add to dashboard Cite

Nature has ingeniously succeeded in producing an impressive variety of inorganic functional structures with a designed shape and size on specific sites through a biologically controlled biomineralization process, usually at near room temperature and in aqueous solutions. The most important principle understood from biomineralization processes is that nucleation and growth of the biomineral phase are almost always carefully and exquisitely controlled by complex organic matrix biopolymerspreorganized supramolecular templates, which are associated to regulate a single, precise step in either the nucleation or the growth portion of the production of the mineral phase. The interaction at a molecular-level solid−liquid interface between a specific surface chemistry and a solution supersaturated with respect to the inorganic material is one key feature of natural biomineralization. The study of biomineralization offers valuable insights into the scope and nature of materials chemistry at the inorganic−organic interface, which represents an inspiration toward future innovations in seeking highly efficient and/or unique materials synthesis strategies. So-called bioinspired ceramics processing has been developed to produce ceramic thin films, to create specific microstructures, or to control crystallization. In the present review, attention is drawn toward the recent increase in research activities involving the preparation of functional ceramic thin films induced by a specific chemical surface modification. This review provides a brief description of the bioinspired process for in situ patterning of ceramic oxides using a template derived from a self-assembled monolayer (SAM) for site-selective nucleation and growth from solutions under normal conditions in terms of pressure and temperature, emphasizing the fundamental knowledge of the chemistry of solutions and interfaces. Our discussion is limited to methods that grow films in a liquid phase by control of the supersaturation of the solution. Sol−gel and methods equipped with additional energy sources, such as hydrothermal synthesis and electrochemical deposition, are excluded. The following issues are addressed: preparation, photocleavage (for structural/lateral modification) and characterization of SAMs, surface−interface chemistry and solution chemistry for the deposition of ceramic oxides from solutions, and patterning of ceramic oxides on the template of SAMs from aqueous solution under mild conditions. We start with a brief overview of the present status of the fundamental methodology for the synthesis of ceramic thin films from solutions and patterning techniques. Then we discuss the biomineralization process and its inspiration to create novel approaches for the production of engineering materials, focusing on ceramic films. Then we discuss chemical aspects of the deposition of films from solutions, including solution chemistry, modification of surfaces, and the physics and chemistry of interfaces. Next, several experimental examples are given to explain how t...

show abstract

“…1,2 The direct patterning of ceramic precursors also is a very attractive process, because it is very simple and similar to the photolithography of commercially available organic resist polymers. So far, the direct patterning of ceramic oxides has been reported by using metallo-organic precursors, including ␤-diketones, 3,4 alkanolamines, 5,6 and others. 7 The authors have reported on the photoreaction of titanium precursors via the addition of diethanolamine (DEA) or triethanolamine (TEA), and the fine patterning of the precursor film was achieved via irradiation with an ultrahigh-pressure mercury lamp with a photomask.…”

Section: Introductionmentioning

confidence: 99%

Patterning of Tin Oxide Film from Photoreactive Precursor Solutions Prepared via the Addition of N‐Phenyldiethanolamine

Kikuta

Suzumori

Takagi

et al. 1999

Journal of the American Ceramic Society

Self Cite

View full text Add to dashboard Cite

Metallo-organic compounds were synthesized for the preparation of tin oxide fine patterning via the addition of alkanolamines. Tin(IV) isopropoxide was chemically modified with diethanolamine (DEA) and/or N-phenyldiethanolamine (PhDEA). Then, the chemical stability and photoreactivity of the prepared metallo-organic compounds were compared. A tin precursor solution that was formed via the stepwise additions of both DEA and PhDEA showed good chemical stability in air and efficient photoreactivities under ultraviolet irradiation. The fine patterning of tin oxide was achieved successfully on a substrate, using the precursor solution.

show abstract

Photoreaction of Titanium‐Based Metal‐organic Compounds for Ceramic Fine Patterning

Cited by 17 publications

References 15 publications

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

Micrometer and nanometer-scale parallel patterning of ceramic and organic–inorganic hybrid materials

Bioinspired Ceramic Thin Film Processing: Present Status and Future Perspectives

Patterning of Tin Oxide Film from Photoreactive Precursor Solutions Prepared via the Addition of N‐Phenyldiethanolamine

Contact Info

Product

Resources

About