2015
DOI: 10.1016/j.tsf.2015.06.024
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Photoluminescence wavelength variation of monolayer MoS2 by oxygen plasma treatment

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Cited by 27 publications
(23 citation statements)
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“…It has recently been demonstrated that electron doping enhances the formation of negative trions in monolayer MoS 2 , thereby, resulting in red‐shift of characteristic peaks . In this regard, the frequency of characteristic peaks is similar to freestanding ones, indicating that n‐type doping effect can be ruled out . This result is consistent with previous Raman results on a decreased n‐type doping level.…”
Section: Resultssupporting
confidence: 90%
“…It has recently been demonstrated that electron doping enhances the formation of negative trions in monolayer MoS 2 , thereby, resulting in red‐shift of characteristic peaks . In this regard, the frequency of characteristic peaks is similar to freestanding ones, indicating that n‐type doping effect can be ruled out . This result is consistent with previous Raman results on a decreased n‐type doping level.…”
Section: Resultssupporting
confidence: 90%
“…Recently, plasma‐assisted doping techniques have emerged as new doping techniques on TMD materials such as MoS 2 and WSe 2 for tuning novel nanoelectronics, optoelectronics, or biosensing devices with significantly enhanced functionalities. In these plasma doping techniques, the top surfaces of MoS 2 are treated with energetic plasmas generated in a reactive ion etcher (RIE) with O 2 , SF 6 , CHF 3 , CF 4 , or Ar . These reactive species in plasma can be effective dopants for 2D materials.…”
Section: Doping Strategiesmentioning
confidence: 99%
“…Therefore, the MoS 2 device properties such as resistance and on‐current fabricated with the oxygen plasma doping can be tuned to 10 4 times by changing the plasma exposure time. Kim et al used O 2 plasma doping of 1L‐MoS 2 to enhance PL emission and absorption and they observed red shifts of ≈20 nm in PL peaks by the O 2 plasma doping caused by the defect states formed by the O 2 plasma …”
Section: Doping Strategiesmentioning
confidence: 99%
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“…However, the effect of N Ã 2 -and Ga-irradiation on the 2D layered-MoS 2 in high to ultra-high vacuum (UHV) environment has not been explored. Focusing on MoS 2 , the tunability of doping, [13][14][15][16][17] optical, [18][19][20] and structural, 21 properties of the layered-MoS 2 has been reported by employing the plasma (O Ã 2 or N Ã 2 ) irradiation. However, in most of these studies, $150 Torr of the background utilized during plasma irradiation, whereas in plasma-assisted MBE (PAMBE), low background $10 À6 Torr can be used for tuning the properties of layered-MoS 2 .…”
Section: Impact Of N-plasma and Ga-irradiation On Mos 2 Layer In Molementioning
confidence: 99%