“…The thermodynamic equilibrium calculation is performed by HSC Chemistry 40 with Gibbs energy minimization method. The input parameters are the initial Ga, AsH 3 , PH 3 and H 2 gas phase amount, growth temperature, reactor pressure and a GaAs 1-y P y alloying interaction parameter (990 cal/mol). 9,16 The calculation therefore considered the formation of Ga, As hydrides (AsH 3 , AsH 2 , AsH), P hydrides (PH 3 , PH 2 , PH), As 2 , As 4 , P 2 , P 4 , AsP, As 2 P 2 , As 3 P, AsP 3 in the vapor phase, and GaAs 1-y P y alloy in the solid phase.…”