Germanium thin films were anodically electrodeposited from ethylenediamine solutions of K 4 Ge 9 which contain the well known Ge 9 4− deltahedral Zintl ions. The anodes were p-doped Si͑100͒ wafers or ITO-covered glass slides. The films were studied for their optical and structural properties by Raman spectroscopy, TEM, and luminescence measurements. The Raman spectra of the films show peaks shifted to lower frequencies compared to the same peaks in bulk germanium and indicate nanocrystalline structure for the films. This is further corroborated by the TEM observations. Laser-induced crystallization at selected areas of the films results in significant growth of the nanocrystals. The films exhibit photoluminescence in the visible light range. This has been attributed to a combination of nanocrystallinity and surface defects. Overall, the optical and structural properties of the anodically electrodeposited thin germanium films can be effectively adjusted by tuning the electrodeposition parameters.Germanium thin films deposited on various substrates are known to give rise to unusual and interesting properties that are important from the point of view of both optoelectronic and microelectronic applications. 1-6 As the film thickness decreases, the surface to volume ratio increases and affects the complexity of the surface morphology. Thus, amorphous germanium with dangling bonds and grain boundaries as well as nanocrystalline and microcrystalline grains of random orientation are known to arise. 1,7 The sizes of the particles and the surface structures are critical for thin film properties such as photoluminescence ͑PL͒, 1,2,6 electrical resistance, 1 etc. It has been shown that the bandgap of germanium nanocrystalline thin films increases when the film thickness decreases from 200 to 5 nm. 1 In addition, as the thickness decreases the film gradually transforms from a continuous to a more and more discontinuous one, and this results in lower conductivity as the discontinuity makes it difficult for electrons with sufficient thermal energy to populate conduction levels. Similarly, the decreasing thickness causes systematic changes in the optoelectronic properties and a gradual shift to higher energies in the PL peak maxima and absorption edges. Studies pertaining to germanium nanocrystals embedded in a GeO 2 matrix show size dependent shifts of the PL peaks which occur in the visible region of the electromagnetic spectrum. 2 Other studies of anodized porous germanium with 3-10 nm nanocrystallites show that the PL spectrum has a broad peak in the near infrared ͑NIR͒ and that surface oxidation induces a new emission band centered in the visible region of the spectrum. 8 Electrodeposition, also known as electrocrystallization, is a well known technique for the preparation of crystalline semiconductors. 9 It attracted considerable interest in the 1980s and 1990s as an approach for the production of economically viable solar cells. It is inexpensive, can yield large area samples, and is readily scalable for industrial produc...