Photoenhanced wet etching of gallium nitride for gate recessing

Škriniarová, Jaroslava; Fox, A.; Bochem, P.; Kordoš, P.

doi:10.1109/asdam.2000.889443

ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat.

DOI: 10.1109/asdam.2000.889443

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Photoenhanced wet etching of gallium nitride for gate recessing

Jaroslava Škriniarová¹,

A. Fox²,

P. Bochem³

et al.

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Photoenhanced wet etching of gallium nitride for gate recessing

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References 8 publications

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