Abstract:A method to determine deep level profiles in highly compensated, wide band gap semiconductors Damaged layers of GaP crystals surface treated by reactive ion etching using PCl 3 gas are evaluated by capacitance-voltage, secondary ion mass spectroscopy, and photocapacitance ͑PHCAP͒ measurements. The reduction of the carrier concentration is observed at the surface region within the depth of 60-70 nm, where Cl atoms injected with high energy are observed. PHCAP measurement reveals that density of the deep levels … Show more
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