2000
DOI: 10.1143/jjap.39.l567
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Phosphorus Vacancy as a Deep Level in AlInP Layers

Abstract: Deep levels in AlInP layers, grown by metal-organic chemical vapor deposition (MOCVD) with various V/III mole ratios, have been carefully investigated by deep-level transient spectroscopy (DLTS). A deep level originating from phosphorus vacancy was observed with the activation energy of 0.65 eV. Examining this phosphorus-vacancy-related deep level provided a relatively simple means of understanding the phosphorus vacancy in AlInP, thus allowing us to determine an appropriate V/III mole ratio for growing AlInP.

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Cited by 3 publications
(2 citation statements)
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“…The Sparameter implies that n-AlInP could involve a density of defects (D s ), including surface states, point defects, 40 carbon and oxygen impurities, 41 and P vacancy. 42 Further, in GaP, metal-induced-gapstates (MIGS) were observed to contribute to the pinning. 43 Thus, the combined effects of them may be responsible for the partial surface Fermi level pinning.…”
Section: Resultsmentioning
confidence: 99%
“…The Sparameter implies that n-AlInP could involve a density of defects (D s ), including surface states, point defects, 40 carbon and oxygen impurities, 41 and P vacancy. 42 Further, in GaP, metal-induced-gapstates (MIGS) were observed to contribute to the pinning. 43 Thus, the combined effects of them may be responsible for the partial surface Fermi level pinning.…”
Section: Resultsmentioning
confidence: 99%
“…Despite the well-established increase in ordering with growth temperature, ordering is a surfacestable phenomenon that is less stable in the bulk crystal; therefore, the degree of ordering in AlInP decreases with annealing. 31,32 The increase in the 1.8-2.1 V, or Al-O emission relative to AlInP ͑Fig. 25 That the broad ϳ1.8-2.1 eV ͑line scan at 1.98 eV͒ feature is in constant proportion to the AlInP emission, and is not enhanced at the AlInP / GaAs interfaces ͑Fig.…”
Section: Discussionmentioning
confidence: 99%