1973
DOI: 10.1002/crat.19730081005
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Phasenbildung in Ni/Si‐Schichten

Abstract: Phssenbildnng in Ni/Si-SchichtenNi-bedampfte amorphe Si-Schichten werden wiihrend des Temperna im Elektronendkroskop untersucht. Es wird gezeigt, da9 im Verlauf dea Diffueionsprozesses in Abhiingigkeit vom Ni-Anteil rn der Schicht acht Phaeen gebildet werden. Generell entstehen zuniichst metsllarme Verbindungen. Am den Ergebnissen wurde geschlossen, daB die Phasenumwandlungen kinetisch und nicht thermodynamisch bedingt sind.Thin films of Ni evaporated onto amorphous Si layers are studied in the electron micros… Show more

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Cited by 9 publications
(5 citation statements)
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“…The lattice parameters of (Si), SiC, ␤ 1 , ␥, ␦, , NiSi, and NiSi 2 calculated from the ternary alloys agree well with those for the pure binary phases. [20,[35][36][37][38][39][40] Thus, ternary solubilities in these phases are presumably negligible. This confirms the findings of Brukl.…”
Section: њG Fccmentioning
confidence: 98%
“…The lattice parameters of (Si), SiC, ␤ 1 , ␥, ␦, , NiSi, and NiSi 2 calculated from the ternary alloys agree well with those for the pure binary phases. [20,[35][36][37][38][39][40] Thus, ternary solubilities in these phases are presumably negligible. This confirms the findings of Brukl.…”
Section: њG Fccmentioning
confidence: 98%
“…The corresponding slope changes of Fig. l c (21.5 a t % Ni content) lie at 400, 560, and 500 "C. This shows the effect, that with higher nickel content the formation temperature of a distinct silicide is lowered [3].…”
Section: Amorphous Silicon-nickel Film Combinationsmentioning
confidence: 74%
“…The EBSD patterns were indexed by the Pm-3m auricupride (AuCu3)-type structure and give a best fit to the synthetic Ni3Si cells from Lashko (1951), Beck et al (1973) and Ochiai et al (1984) (Fig. 4), with a mean angular deviation of 0.30º -0.35º, revealing the following cell parameters: cubic, a = 3.51(1) Å, space group: Pm-3m, V = 43.2(4) Å 3 , Z = 1.…”
Section: Occurrence Chemistry and Crystallographymentioning
confidence: 99%
“…Single-crystal electron backscatter diffraction (EBSD) analyses were performed at Caltech using methods described in Rossman (2008, 2009 (Lashko, 1951;Toman, 1952;Beck et al, 1973;Ochiai et al, 1984, Rabadanov andAtaev 2002;Schuette et al, 2003;Perez et al, 2004).…”
Section: Introductionmentioning
confidence: 99%