“…The ML structure is then deposited onto the coated Si substrate. The coated substrate in some cases has been etched from the back prior to the ML deposition leaving a window with a thin SiN or SiC membrane (30-890 nm) supporting a ML coating (Schä -fers et al, 1999;Khan Malek et al, 1989;Di Fonzo et al, 1994;Nguyen,1994;Da Silva et al, 1995b;Tinone et al, 1996;Wang et al, 2003Wang et al, , 2007. Sometimes this free membrane is coated on both sides (Zeitoun et al, 2004;Hubert et al, 2001;Smith et al, 2003).…”