Phase modulation with micromachined resonant mirrors for low-coherence fiber-tip pressure sensors

Zhang, Xuming; Liu, Yuxiang; Bae, Hae-Young; Pang, Cheng; Yu, Miao

doi:10.1364/oe.17.023965

Cited by 27 publications

(8 citation statements)

References 31 publications

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“…In Figure 6(b), the transient response of the fiber-tip sensor is obtained by introducing a sudden pressure drop from 254 to 101 kPa in a pressure chamber, achieved by continuously increasing chamber pressure to burst the plastic sealing diaphragm. Compared with a reference pressure sensor (LL-080-25A, Kulite Semiconductor Products), the fiber-tip sensor has a slower response (~150 ms), which is believed to be due to the visco-elastic property of polymer diaphragm [9]. This result also indicates that the optical MEMS sensor platform can be used to effectively interrogate a Fabry-Pérot fiber optic sensor in a relative high frequency situation.…”

Section: Experiments and Resultsmentioning

confidence: 99%

Multifunctional optical MEMS sensor platform for wireless optical sensor networks

Pang

Zhang

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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This paper reports a multifunctional optical sensor platform based on the microelectromechanical systems (MEMS) technology with the aim to miniaturize conventional bulky optical measurement systems for space-constrained applications and harsh environment. Small discrete optical components are integrated onto a printed circuit board by using optical fibers as the waveguide. Low-coherence interferometry is used for modulation and retrieval of the sensing signal. The whole optical system including the related circuit takes up a footprint of 2.2″ × 1.5″. To test the functionality, a fiber-tip pressure sensor is interrogated using this platform. The successful demonstration suggests that this platform can be used for optical measurement in the sensor node of Wireless Sensor Networks (WSNs).

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Section: Experiments and Resultsmentioning

confidence: 99%

Multifunctional optical MEMS sensor platform for wireless optical sensor networks

Pang

Zhang

et al. 2011

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference

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“…We investigated the acoustic emission detection properties of the PZT/PVDF composite film with reference to the American Society for Testing and Materials -ASTM E976-10 standard [23], as shown in Fig. 2.…”

Section: Methodsmentioning

confidence: 99%

Characterization of PZT/PVDF Composite Film as Functional Material

et al. 2018

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In this paper, we obtained and characterized a composite film made of lead zirconate titanate (PZT) piezoelectric ceramic and nonpolar polyvinylidene fluoride (α-PVDF) as a functional material. The scanning electron microscopy results show this composite film to have mixed connectivity due to the agglomeration of some of the PZT particles. The response of the composite to an applied ac voltage at 4110 Hz has a slope of 0.074 nm/V. The measured displacement is in the range of 0-30 nm for electric voltages ranging from 0 to 400 V. The experimental results show the composite performance as an acoustic emission sensor to be in good agreement with the response of a commercial standard microphone in the frequency range of 2-6 kHz. By applying 2 kN of cyclic force at a frequency of 3 Hz, we obtained an 80-V peak signal and calculated a dissipated power equal to 158 μW. Index Terms-Lead zirconate titanate (PZT), non-polar polyvinylidene fluoride (α-PVDF).Ricardo Luiz Barros de Freitas received the B.Sc. degree in computer engineering from the School of Engineering of Lins in 2005 and the M.Sc. and Ph.D. degrees in electrical engineering from UNESP-São Paulo State University, Ilha Solteira, Brazil, in 2008 and 2012, respectively. He joined the UNESP Optimization Group, Ilha Solteira with a CNPq PDJ grant (2015), as a Post-Doctoral Researcher. He has experience in electrical engineering, computer engineering, and biomedical engineering. He is currently an Adjunct Professor Doctor with the Department of Electrical Engineering and collaborator of the Master's Program in electrical engineering and computing with UNIOESTE-CECE-Campus Foz do Iguaçu. His research interests are knowledge optimization, intelligent materials, piezoelectricity, electronic instrumentation, structured programming, microcontrollers, sensors, hardware, software, and artificial neural networks.

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“…However, the WL-PMDI method has attracted only a little attention for a long time because of the path-matching difficulties. In recent years, there have been growing interests in interrogating the miniature fiber EFPI acoustic sensor by this scheme [8], [9]. Ref.…”

Section: Introductionmentioning

confidence: 99%

Interrogation of Extrinsic Fabry–Perot Sensors Using Path-Matched Differential Interferometry and Phase Generated Carrier Technique

Wang

Xie

et al. 2015

J. Lightwave Technol.

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Fiber-optic extrinsic Fabry-Perot interferometer (EFPI) sensors utilizing the state-of-the-art MEMS technology have been intensively studied on sensor fabrication for various applications, whereas the signal interrogation technique is still inadequate for some particular applications especially those involving dynamic sensing with high frequency. In this paper, we proposed a white light path-matched differential interferometer system utilizing phase generated carrier (PGC) demodulation method for dynamic EFPI sensors interrogation. A fiber Michelson interferometer (MI) is cascaded with the EFPI sensor as a read-out interferometer. One arm of the MI contains a step-motor-assisted movable mirror-collimator pair to realize exactly path matching, and another arm is wound on a piezoelectric transducer ring to introduce the carrier signal for PGC demodulation. The general design principles of the system are presented in detail. Experimental results shown that the sensing signal can be correctly recovered with low distortion. The spectrum level of the phase noise is as low as -103 dB re. rad/ √ Hz at 1 kHz. The presented interrogation scheme may find promising applications in lots of dynamic EFPI sensing fields, such as acoustic and vibration sensing, etc.Index Terms-Fabry-Perot, path-matched differential interferometer, phase generated carrier, dynamic sensing, optical homodyne. 0733-8724 (c)

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Phase modulation with micromachined resonant mirrors for low-coherence fiber-tip pressure sensors

Cited by 27 publications

References 31 publications

Multifunctional optical MEMS sensor platform for wireless optical sensor networks

Multifunctional optical MEMS sensor platform for wireless optical sensor networks

Characterization of PZT/PVDF Composite Film as Functional Material

Interrogation of Extrinsic Fabry–Perot Sensors Using Path-Matched Differential Interferometry and Phase Generated Carrier Technique

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