2004
DOI: 10.1016/j.tsf.2004.03.021
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Phase evolution of sol–gel prepared Pb(Zr0.3Ti0.7)O3 thin films deposited on IrO2/TiO2/SiO2/Si electrodes

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Cited by 14 publications
(8 citation statements)
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“…Law et al [37] reported that PZT (5 mol.% excess Pb) thin films deposited by the sol-gel method on a Pt(111)/Ti/SiO 2 /Si substrate exhibited pyrochlore (222) phase ascribed to 2h =298 at pyrolysis temperatures above 400 8C. Van Genechten et al [38] reported that PZT (16 mol.% excess Pb) thin films fabricated by the sol-gel method on IrO 2 substrates that crystallized at below 580 8C also exhibited pyrochlore (222), (400) and (440) phase ascribed to 2h = 29, 34 and 498, respectively. Wang et al [39] reported that PZT (-10 and 0 mol.% excess Pb) thin [41]).…”
Section: Methodsmentioning
confidence: 99%
“…Law et al [37] reported that PZT (5 mol.% excess Pb) thin films deposited by the sol-gel method on a Pt(111)/Ti/SiO 2 /Si substrate exhibited pyrochlore (222) phase ascribed to 2h =298 at pyrolysis temperatures above 400 8C. Van Genechten et al [38] reported that PZT (16 mol.% excess Pb) thin films fabricated by the sol-gel method on IrO 2 substrates that crystallized at below 580 8C also exhibited pyrochlore (222), (400) and (440) phase ascribed to 2h = 29, 34 and 498, respectively. Wang et al [39] reported that PZT (-10 and 0 mol.% excess Pb) thin [41]).…”
Section: Methodsmentioning
confidence: 99%
“…14,15 In addition, to the use of buffer and seed layers, it has been known for many years that oxide electrodes used instead of plantinum (Pt on Ti/SiO2/Si) improve performance since they prevent undesired compositional modification and impede charge interdiffusion processes. [16][17][18][19] Table I describes some examples of the effect of interlayers on ferroelectric films.…”
Section: Introductionmentioning
confidence: 99%
“…One kind is noble metals, such as Pt and Au, for their low resistivity and stable chemical state. The other kind is conductive oxides, including rutile-related metallic oxides (RuO 2 , IrO 2 , and ITO) [9][10][11] and perovskiterelated metallic oxides (LaNiO 3 (LNO), SrRuO 3 , (La,Sr)CoO 3 and Nb-doped SrTiO 3 et al). [12][13][14][15] However, several intrinsic problems may impede their practical use in the ferroelectric micro-devices.…”
Section: Introductionmentioning
confidence: 99%