Phase diagrams for CVD diamond deposition from halogen-containing gas phase

Liu, Zhijie; Zhang, David Wei; Zhang, Jianyun; Wan, Yizao; Wang, Jitao

doi:10.1016/s0040-6090(98)01329-7

Cited by 9 publications

(3 citation statements)

References 21 publications

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“…Numerous investigations have been conducted concerning the thermodynamics of the processes involving either a C-H/C-H-O precursor systems or a halogen containing gas phase. [182][183][184] The deposition of diamond or graphite from the gas phase is a problem of kinetics or a kinetic barrier. But, thermodynamically the conditions can be predicted under which diamond or graphite is not stable with respect to the gas phase.…”

Section: Low Temperature Diamond Synthesismentioning

confidence: 99%

“…Thermodynamics of diamond film deposition at low pressure in the C-H-X (X5F, Cl) system was studied 183 according to a non-equilibrium thermodynamic coupling model proposed by Wang, 186 which is not discussed in this article. The projective and sectional temperature-gas composition phase diagrams for the C-H-F system in the pressure range of 100-6670 Pa and for the C-H-Cl system between 100-5000 Pa are shown in Fig.…”

Section: Low Temperature Diamond Synthesismentioning

confidence: 99%

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A review of nucleation, growth and low temperature synthesis of diamond thin films

Das¹,

Singh²

2007

International Materials Reviews

146

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Diamond thin films have outstanding optical, electrical, mechanical and thermal properties, which make these attractive for applications in a variety of current and future systems. In particular, the wide band gap, optical transparency and unusually high thermal conductivity of diamond thin films make them an ideal semiconductor for applications in current and future electronics. However, synthesis of diamond thin films with adequate quality remains a challenging task. Synthesis of diamond at low temperatures is even more challenging because of the difficulties in the nucleation and growth steps involved in diamond thin film deposition on a variety of substrates. Among the several deposition techniques for synthesising diamond films, plasma enhanced chemical vapour deposition is the most promising technique because of its potential for low temperature synthesis. Consequently, the first part of this paper reviews the current state of the nucleation and growth of diamond during chemical vapour deposition. A uniform and high nucleation density is a prerequisite for getting a good quality diamond film with significant growth rate. Also, since the process conditions for nucleation and growth steps are different, attempts are made in this review to identify the important parameters responsible for enhancing the nucleation and growth rates of diamond film. Describing the indispensable need for low temperature growth of diamond film, the second part of the paper reviews the research on the growth of diamond thin films at low temperatures. In spite of the slower kinetics at lower deposition temperatures, an attempt is made to identify the key processing conditions, which enhance the low temperature growth process. In addition, the mechanisms of diamond nucleation and growth are discussed based on the observations from in situ characterisation techniques such as Fourier transform infrared reflection absorption spectroscopy, real time spectroscopic ellipsometry and molecular beam mass spectroscopy.

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Section: Low Temperature Diamond Synthesismentioning

confidence: 99%

Section: Low Temperature Diamond Synthesismentioning

confidence: 99%

A review of nucleation, growth and low temperature synthesis of diamond thin films

Das¹,

Singh²

2007

International Materials Reviews

146

View full text Add to dashboard Cite

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“…Another demonstration of its ability of etching away weak bonds is the role of F in diamond growth. Fluorine addition favors the growth of diamonds over graphite and pushes the growth condition to lower temperature and lower pressure [22][23][24],…”

Section: Growth Modelmentioning

confidence: 99%

Growth and properties of nanocrystalline Ge and Ge[subscript 1-x]C[subscript x] films and photovoltaic devices

Niu

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The quality of this reproduction is dependent upon the quality of the copy submitted. Broken or indistinct print, colored or poor quality illustrations and photographs, print bleed-through, substandard margins, and improper alignment can adversely affect reproduction. In the unlikely event that the author did not send a complete manuscript and there are missing pages, these will be noted. Also, if unauthorized copyright material had to be removed, a note will indicate the deletion.

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Nondissipative Thermodynamics and Ternary Nonequilibrium Phase Diagrams

Wang

2011

Modern Thermodynamics

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Phase diagrams for CVD diamond deposition from halogen-containing gas phase

Cited by 9 publications

References 21 publications

A review of nucleation, growth and low temperature synthesis of diamond thin films

A review of nucleation, growth and low temperature synthesis of diamond thin films

Growth and properties of nanocrystalline Ge and Ge[subscript 1-x]C[subscript x] films and photovoltaic devices

Nondissipative Thermodynamics and Ternary Nonequilibrium Phase Diagrams

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